{"id":"W4206850209","doi":"","title":"Normally-OFF GaN HEMT Fabrication Using Soft and Selective Etching of the Si3N4 Cap Layer","year":2018,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Etching (microfabrication); Fabrication; High-electron-mobility transistor; Materials science; Optoelectronics; Layer (electronics); Gallium nitride; Wide-bandgap semiconductor; Transistor; Electrical engineering; Nanotechnology; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001713824,0.0002458994,0.0003117695,0.00007239304,0.0003309473,0.0002074877,0.0006065211,0.000123699,0.0001782654],"category_scores_gemma":[0.0001238343,0.0002141321,0.0001384451,0.0001533342,0.0001837362,0.0001151373,0.0007433629,0.0003127659,0.000004802759],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004900655,"about_ca_system_score_gemma":0.0002826921,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00502712,"about_ca_topic_score_gemma":0.0002757396,"domain_scores_codex":[0.9970842,0.001596754,0.0004108096,0.0004523119,0.0002160302,0.000239886],"domain_scores_gemma":[0.9963326,0.0003341704,0.000748181,0.001051348,0.001456893,0.00007680935],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003087574,0.0007002019,0.09285945,0.0005002319,0.0004622191,4.614785e-7,0.03091488,0.0004510184,0.8317822,0.01923357,0.001131339,0.0219336],"study_design_scores_gemma":[0.0004166526,4.881494e-7,0.01431398,0.00125992,0.0001205606,0.000001759416,0.0003601116,0.0104403,0.9644222,0.006038221,0.002199004,0.0004268469],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9698469,0.0002781575,0.01904146,0.0004848767,0.0002735291,0.0004036424,0.0001221217,0.00003610606,0.009513213],"genre_scores_gemma":[0.99524,0.00001958442,0.003954554,0.00003680756,0.00007846631,0.00002066845,0.0001088129,0.00003189612,0.000509158],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.13264,"threshold_uncertainty_score":0.8732054,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01695946516547646,"score_gpt":0.2412641296683071,"score_spread":0.2243046645028307,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}