{"id":"W4211142896","doi":"10.1007/978-1-4020-8021-0_11","title":"Electrostatic Actuators","year":2004,"lang":"en","type":"book-chapter","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Electrode; Actuator; Voltage; Capacitance; Materials science; Electrostatics; Electrical engineering; Mechanical engineering; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00000918182,0.0002177543,0.0001892892,0.00009189675,0.00001652437,0.000007924962,0.0001005474,0.0002531969,0.0006382807],"category_scores_gemma":[0.000003784106,0.0001954676,0.00005790855,0.0000126102,0.00003168849,0.00003642829,0.00001796333,0.0003055299,0.0002829844],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001255946,"about_ca_system_score_gemma":0.00001480168,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001152146,"about_ca_topic_score_gemma":0.000008699972,"domain_scores_codex":[0.9995107,8.376695e-8,0.0001190965,0.0001216485,0.00007541099,0.0001730322],"domain_scores_gemma":[0.9997234,0.00001145524,0.00001723273,0.0002110299,0.000009555423,0.00002736803],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[9.720893e-7,0.000001536533,4.752969e-8,0.00006623703,0.00006178733,0.00002413459,0.00001238539,0.0002638248,0.002216416,0.9332193,0.003569132,0.06056423],"study_design_scores_gemma":[0.00009560961,0.00003598879,6.976863e-7,0.00007802316,0.00001623989,0.000005793627,0.000004028183,0.00001204891,0.01461239,0.6012658,0.3835018,0.000371516],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":"theoretical_or_conceptual","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.000072551,0.0006269219,0.005491834,0.00002285902,0.0001444495,0.0001075148,0.000005416495,0.002271933,0.9912565],"genre_scores_gemma":[0.01194747,0.004577795,0.01333674,0.00007281308,0.00009447254,0.00001505137,0.00002230871,0.0002295109,0.9697039],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.3799327,"threshold_uncertainty_score":0.7970938,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006374610774568371,"score_gpt":0.1872115891046869,"score_spread":0.1808369783301185,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}