{"id":"W4211142896","doi":"10.1007/978-1-4020-8021-0_11","title":"Electrostatic Actuators","year":2004,"lang":"en","type":"book-chapter","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Electrode; Actuator; Voltage; Capacitance; Materials science; Electrostatics; Electrical engineering; Mechanical engineering; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001260537,0.000977308,0.0004689407,0.0006842705,0.0007696406,0.0009384419,0.0007088002,0.0008666756,0.04350504],"category_scores_gemma":[0.0001801327,0.0003662502,0.0003191823,0.000613757,0.0004178539,0.001138585,0.000828918,0.001047035,0.02730474],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005133009,"about_ca_system_score_gemma":0.0003893863,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004609116,"about_ca_topic_score_gemma":0.001408708,"domain_scores_codex":[0.999816,0.000007454028,0.000004931314,0.00003826752,0.0001184863,0.00001489151],"domain_scores_gemma":[0.9999436,0.000008000924,0.000003554068,0.0000119547,0.00002712844,0.000005615219],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00005421776,0.00006925443,0.0001261491,0.0005426668,0.00001747165,0.0002107972,0.0002220948,0.001198937,0.08445726,0.1030161,0.237559,0.572526],"study_design_scores_gemma":[0.000003588535,0.00002080743,0.0002259394,0.00004610902,0.000006426287,0.0003199877,0.00002573515,0.0007831577,0.01430699,0.005559116,0.9786934,0.000008655634],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.00330482,0.01576587,0.06561595,0.001081169,0.002801546,0.00008616277,0.0003730862,0.001265072,0.9097064],"genre_scores_gemma":[0.008279949,0.004221214,0.007362759,0.0003285915,0.0001955667,0.00004053961,0.0002178209,0.000107762,0.9792459],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.04350504,"threshold_uncertainty_score":0.1455389,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006374610774568371,"score_gpt":0.1872115891046869,"score_spread":0.1808369783301185,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}