{"id":"W4213315347","doi":"10.1038/s41378-021-00338-y","title":"High-resolution fabrication of nanopatterns by multistep iterative miniaturization of hot-embossed prestressed polymer films and constrained shrinking","year":2022,"lang":"en","type":"article","venue":"Microsystems & Nanoengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; Government of Canada; Ontario Research Foundation","keywords":"Miniaturization; Nanoimprint lithography; Materials science; Nanotechnology; Nanolithography; Fabrication; Embossing; Lithography; Microscale chemistry; Resist; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001665791,0.0002149092,0.0003390607,0.0003237621,0.00008067056,0.00002591734,0.0001581563,0.00007602076,0.00002717283],"category_scores_gemma":[0.00001348971,0.0002531125,0.00006669079,0.0004773987,0.00004512593,0.0001408121,0.00004920735,0.0001315777,3.18085e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005846484,"about_ca_system_score_gemma":0.00001388392,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001419957,"about_ca_topic_score_gemma":0.000002590103,"domain_scores_codex":[0.9986982,0.00005910411,0.000584834,0.0002315555,0.0002154368,0.0002108331],"domain_scores_gemma":[0.9993572,0.000058839,0.0002152434,0.0002329839,0.00008499892,0.00005078273],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001283423,0.00003550575,0.001177462,0.0003095996,0.00005356229,7.240413e-7,0.0006443748,0.006707061,0.9899591,0.0003881938,0.0003383759,0.0003732721],"study_design_scores_gemma":[0.0006761157,0.00008203559,0.003357233,0.0001741302,0.00003206786,0.00001366404,0.0002187069,0.04098219,0.9530048,0.00000342235,0.001158106,0.0002975714],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9096323,0.003449565,0.08497483,0.00001230305,0.00035047,0.0005773152,0.0005796559,0.0003634483,0.00006016217],"genre_scores_gemma":[0.9959947,0.00005231542,0.00348719,0.000006263517,0.00001842824,0.00012051,0.0002210676,0.00004548249,0.00005397607],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08636251,"threshold_uncertainty_score":0.9999921,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003616277637151594,"score_gpt":0.1827295382865165,"score_spread":0.1791132606493649,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}