{"id":"W4213315347","doi":"10.1038/s41378-021-00338-y","title":"High-resolution fabrication of nanopatterns by multistep iterative miniaturization of hot-embossed prestressed polymer films and constrained shrinking","year":2022,"lang":"en","type":"article","venue":"Microsystems & Nanoengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; Government of Canada; Ontario Research Foundation","keywords":"Miniaturization; Nanoimprint lithography; Materials science; Nanotechnology; Nanolithography; Fabrication; Embossing; Lithography; Microscale chemistry; Resist; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003354599,0.0005993618,0.0003962003,0.0003741942,0.0001823047,0.0003612512,0.0005698337,0.0003558833,0.0005474762],"category_scores_gemma":[0.0004495296,0.0004640792,0.0004248093,0.0002356123,0.000345821,0.0005227762,0.0004585213,0.0008044828,0.0002697105],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002414926,"about_ca_system_score_gemma":0.0001800443,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003135585,"about_ca_topic_score_gemma":0.000781604,"domain_scores_codex":[0.9996893,0.00002671288,0.00003649522,0.00008567217,0.0001201483,0.00004172415],"domain_scores_gemma":[0.9996452,0.000133839,0.00009785523,0.00006775299,0.0000343088,0.00002104675],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007653004,0.000009509949,0.00003302759,0.00003039564,0.000004265315,0.00002768236,0.00001707236,0.0002037005,0.9971977,0.000101205,0.00001830551,0.002349517],"study_design_scores_gemma":[0.000003400928,0.00004066663,0.0003956719,0.000002153964,0.000005429181,0.00004999195,0.00000445245,0.002200023,0.9965688,0.00002508138,0.0006983358,0.000005972088],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7963564,0.003437503,0.1951006,0.0001520053,0.0001265976,0.0002786931,0.0002973723,0.001146068,0.003104807],"genre_scores_gemma":[0.7274615,0.00214954,0.2668222,0.00009477113,0.00003560115,0.0003032963,0.0004406198,0.0001599579,0.002532509],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005993618,"threshold_uncertainty_score":0.001831472,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003616277637151594,"score_gpt":0.1827295382865165,"score_spread":0.1791132606493649,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}