{"id":"W4214872218","doi":"10.26434/chemrxiv.14206619.v1","title":"Cobalt Metal ALD: Understanding the Mechanism and Role of Zink Alkyl Precursors as Reductants for Low Resistivity Co Thin Films","year":2021,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Irish Centre for High-End Computing; Partnership for Advanced Computing in Europe AISBL; Deutscher Akademischer Austauschdienst; Science Foundation Ireland","keywords":"Alkyl; Atomic layer deposition; Thin film; Substrate (aquarium); Reactivity (psychology); Chemistry; Metal; Cobalt; Materials science; Chemical engineering; Inorganic chemistry; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009810174,0.0002675836,0.0001841105,0.0001609732,0.0001356916,0.0003807667,0.000338814,0.0002527054,0.000872321],"category_scores_gemma":[0.0001402546,0.000118995,0.0001427514,0.000087682,0.0002174702,0.0006017588,0.0001580718,0.0003476131,0.0002544384],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003063596,"about_ca_system_score_gemma":0.0001589983,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008985033,"about_ca_topic_score_gemma":0.0008936649,"domain_scores_codex":[0.9999515,0.000004325761,0.00000259869,0.0000115834,0.0000157831,0.00001430765],"domain_scores_gemma":[0.9999552,0.0000115542,0.00001311777,0.000006826228,0.000009296276,0.000003994132],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001032086,0.00004119131,0.001357543,0.0007093223,0.00001807816,0.0002778196,0.0001045489,0.002896604,0.9780964,0.005776409,0.0001054422,0.01051335],"study_design_scores_gemma":[0.000009462394,0.0001133937,0.002014102,0.00002466529,0.00003189446,0.0003139961,0.0001315018,0.03094937,0.9587902,0.001478113,0.006132009,0.00001132008],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9084654,0.02100368,0.06070004,0.0006425236,0.00008706914,0.00008109461,0.0002142335,0.0002866132,0.008519345],"genre_scores_gemma":[0.9843189,0.005263747,0.008697985,0.00003945727,0.00001912335,0.00001473752,0.00007869946,0.0000187612,0.001548538],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008985033,"threshold_uncertainty_score":0.002918184,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03057704564686531,"score_gpt":0.2537667669595481,"score_spread":0.2231897213126828,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}