{"id":"W4223984911","doi":"10.3390/s22082994","title":"Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors","year":2022,"lang":"en","type":"article","venue":"Sensors","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Microfabrication; Microelectromechanical systems; Surface micromachining; Materials science; Nanotechnology; Fabrication; Accelerometer; Microtechnology; Microsystem; Optoelectronics; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003830669,0.000685639,0.0003551196,0.0003699959,0.0002470034,0.0002936062,0.0007205507,0.0006077744,0.0009274813],"category_scores_gemma":[0.0005789062,0.0004361281,0.0005510542,0.0002141743,0.0003015812,0.0003876684,0.0004473417,0.0007929403,0.0007731203],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002267414,"about_ca_system_score_gemma":0.0002149638,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000223103,"about_ca_topic_score_gemma":0.0005062575,"domain_scores_codex":[0.9993709,0.00004285298,0.00004595091,0.0001387639,0.000334494,0.00006698116],"domain_scores_gemma":[0.9997272,0.00005599943,0.0001053942,0.0000524121,0.00004149141,0.00001758451],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000649515,0.00001256917,0.00002939241,0.00004144084,0.000003054711,0.00005408107,0.00001677456,0.0001775673,0.9960437,0.000123556,0.00007422388,0.003417164],"study_design_scores_gemma":[0.000005522443,0.0001213602,0.0005281947,0.000004292778,0.000005940179,0.0001763496,0.00001021249,0.00113015,0.9946796,0.00003863408,0.003289677,0.000009967775],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6230666,0.005954285,0.3539675,0.0009481007,0.0009362389,0.000758261,0.0005996199,0.003397972,0.0103714],"genre_scores_gemma":[0.6824719,0.002102302,0.3069463,0.0002958899,0.000144418,0.0003798609,0.0003653933,0.0002424177,0.007051541],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009274813,"threshold_uncertainty_score":0.00310272,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01082222792507555,"score_gpt":0.2233349491936006,"score_spread":0.2125127212685251,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}