{"id":"W4224314990","doi":"10.1038/s41467-022-29447-6","title":"Non-invasive digital etching of van der Waals semiconductors","year":2022,"lang":"en","type":"article","venue":"Nature Communications","topic":"2D Materials and Applications","field":"Materials Science","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"Fundamental Research Funds for the Central Universities; Fonds de recherche du Québec – Nature et technologies; Natural Sciences and Engineering Research Council of Canada; Centre International de Recherche aux Frontières de la Chimie; China Scholarship Council; National Research Foundation of Korea; Japan Society for the Promotion of Science; Nanjing University; Government of Jiangsu Province; Ministry of Education, Culture, Sports, Science and Technology; Agence Nationale de la Recherche; National Research Foundation; Graphene Flagship; National Natural Science Foundation of China","keywords":"van der Waals force; Materials science; Etching (microfabrication); Microelectronics; Nanotechnology; Semiconductor; Optoelectronics; Thermal; Chemistry; Molecule; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001061218,0.0001924052,0.0001303544,0.0001317718,0.000104835,0.0002439472,0.0002734642,0.0001627935,0.0007837759],"category_scores_gemma":[0.0001939289,0.000138721,0.00007702871,0.00008894138,0.000230671,0.0001915787,0.000245184,0.0002311037,0.000177472],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001869247,"about_ca_system_score_gemma":0.0001423623,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002772813,"about_ca_topic_score_gemma":0.0007373717,"domain_scores_codex":[0.9999075,0.000007872646,0.000006385199,0.00002238452,0.00003929767,0.00001652742],"domain_scores_gemma":[0.9999037,0.00002717743,0.00002803441,0.00002443359,0.00001147545,0.000005208834],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008396535,0.000003278543,0.00004335916,0.00001863608,0.000001753569,0.00001609194,0.000008944375,0.0001057438,0.9981586,0.0003079339,0.000033227,0.001293943],"study_design_scores_gemma":[0.000002520033,0.00002256147,0.0001851844,0.000001093355,0.000001573118,0.00004058642,0.000007244283,0.001242218,0.9973549,0.00005913274,0.001080338,0.000002810305],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9743667,0.0004649347,0.02146446,0.00009437248,0.00005126893,0.00003386488,0.0001830368,0.0001544202,0.003186993],"genre_scores_gemma":[0.9860471,0.0002739571,0.01121034,0.00002506004,0.000006789269,0.00001944019,0.00006363726,0.00002758547,0.002326031],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007837759,"threshold_uncertainty_score":0.002621949,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01956273187994025,"score_gpt":0.2905386822264057,"score_spread":0.2709759503464654,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}