{"id":"W4225552373","doi":"10.1109/jmems.2022.3165716","title":"Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding","year":2022,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Mitacs","keywords":"Eutectic system; Materials science; Wetting; Dissolution; Compatibility (geochemistry); Alloy; Ternary operation; Eutectic bonding; Metallurgy; Wafer; Melting temperature; Chemical engineering; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000224432,0.0003885262,0.0003140431,0.0002563748,0.0002460381,0.0004952076,0.0004529464,0.0004958289,0.001995466],"category_scores_gemma":[0.0005917349,0.0002189731,0.0001904487,0.0002244662,0.0001821718,0.0004792609,0.0004526667,0.0002292688,0.0004195809],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001775204,"about_ca_system_score_gemma":0.0001192077,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004205979,"about_ca_topic_score_gemma":0.0007238477,"domain_scores_codex":[0.9997003,0.00004132286,0.00001620687,0.0000787237,0.0001012202,0.00006229773],"domain_scores_gemma":[0.999798,0.00005959689,0.00005570001,0.00002752432,0.0000498421,0.000009365965],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005986991,0.00001861609,0.0007226948,0.00006061939,0.00001082455,0.0001057973,0.00005513613,0.0004133,0.9963635,0.0001130115,0.00003632135,0.002040311],"study_design_scores_gemma":[0.000003155757,0.0003186842,0.001795604,0.000004192198,0.00001332989,0.0001002553,0.00004480945,0.001671725,0.995293,0.000033507,0.0007169888,0.000004731059],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9949302,0.0003729789,0.002476792,0.0000319152,0.000008572707,0.00002838434,0.00009943799,0.00007812103,0.001973561],"genre_scores_gemma":[0.9960833,0.0001904508,0.002707649,0.00001329217,0.000003225977,0.00002569608,0.00006636001,0.00003476222,0.0008752137],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001995466,"threshold_uncertainty_score":0.006675541,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04613955810319353,"score_gpt":0.207922286488384,"score_spread":0.1617827283851905,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}