{"id":"W4225552373","doi":"10.1109/jmems.2022.3165716","title":"Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding","year":2022,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Mitacs","keywords":"Eutectic system; Materials science; Wetting; Dissolution; Compatibility (geochemistry); Alloy; Ternary operation; Eutectic bonding; Metallurgy; Wafer; Melting temperature; Chemical engineering; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007133935,0.0001880988,0.0004791087,0.0002237865,0.0001657952,0.00004912253,0.0003987158,0.00004597207,0.00003712473],"category_scores_gemma":[0.00002534783,0.0001523385,0.0001183777,0.0004552511,0.00002123975,0.0002346555,0.00008928069,0.000982382,0.000005660352],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006108114,"about_ca_system_score_gemma":0.00004364429,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001974255,"about_ca_topic_score_gemma":0.0000032475,"domain_scores_codex":[0.9983205,0.00009063569,0.0005933469,0.0001588728,0.0004291411,0.0004075642],"domain_scores_gemma":[0.9993154,0.00009117393,0.0001972315,0.0002386837,0.00006666814,0.00009080004],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002606923,0.0002993191,0.0006593665,0.0002943391,0.0006709268,0.0003792335,0.0004156869,0.01721704,0.9645982,0.006295353,0.004302518,0.004607324],"study_design_scores_gemma":[0.01372901,0.03228408,0.002799464,0.001671982,0.0009505206,0.04175271,0.02083694,0.09011585,0.444283,0.005754075,0.3406654,0.005156983],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9827833,0.001417273,0.01414738,0.0001907251,0.0008812969,0.0001790976,0.000005039001,0.0002585072,0.0001374107],"genre_scores_gemma":[0.9992683,0.00007107614,0.0004348049,0.00002384821,0.00009039787,0.00003479876,9.727868e-7,0.00004175545,0.0000340746],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5203152,"threshold_uncertainty_score":0.6212183,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04613955810319353,"score_gpt":0.207922286488384,"score_spread":0.1617827283851905,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}