{"id":"W4229506424","doi":"10.1117/3.601520.ch5","title":"Wafer Steppers","year":2009,"lang":"en","type":"book-chapter","venue":"SPIE eBooks","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Wafer; Stepper; Wafer testing; Contact print; Resist; Scanner; Materials science; Optoelectronics; Engineering drawing; Nanotechnology; Optics; Engineering; Electrical engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004072927,0.001278475,0.0008728872,0.00153119,0.001129351,0.00179954,0.001821688,0.001313769,0.08245333],"category_scores_gemma":[0.001073792,0.0009366338,0.0007836743,0.001509557,0.0003736177,0.002128777,0.002071738,0.001859652,0.04639696],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00082682,"about_ca_system_score_gemma":0.0007212593,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007060062,"about_ca_topic_score_gemma":0.001257314,"domain_scores_codex":[0.9989541,0.00004904105,0.0000476097,0.0001820168,0.0006583954,0.0001087577],"domain_scores_gemma":[0.9995949,0.00006078526,0.00003731082,0.0001041349,0.0001692211,0.00003371196],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0002229499,0.0001442245,0.0006814094,0.002473414,0.00005251395,0.0007903429,0.0004847052,0.003682662,0.160139,0.06628956,0.2465505,0.5184887],"study_design_scores_gemma":[0.0000135188,0.0001035296,0.0003322183,0.0001222172,0.00001512837,0.0005831619,0.00006955128,0.001482708,0.05758563,0.003390259,0.9362641,0.00003801679],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.01825189,0.02808944,0.4266394,0.001129443,0.004348037,0.002016373,0.008886604,0.03061017,0.4800286],"genre_scores_gemma":[0.1007094,0.02380627,0.4096482,0.002865891,0.0005567756,0.00199149,0.01698815,0.005067678,0.4383661],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.08245333,"threshold_uncertainty_score":0.2758338,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01118333166730386,"score_gpt":0.2192739778575897,"score_spread":0.2080906461902858,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}