{"id":"W4231347437","doi":"10.26434/chemrxiv.13077386","title":"Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD","year":2020,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Atomic layer deposition; Figure of merit; Thermal decomposition; Chemical vapor deposition; Volatilisation; Deposition (geology); Thermal; Materials science; Layer (electronics); Nanotechnology; Chemistry; Optoelectronics; Organic chemistry; Physics; Geology; Meteorology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001038691,0.0002134404,0.0004440911,0.00003219517,0.00001592878,0.00004352097,0.0001597507,0.0001923146,0.0000254156],"category_scores_gemma":[0.00006127982,0.0002053359,0.0001105936,0.00001982692,0.00002866659,0.00004090568,0.00007675192,0.00009264763,6.568869e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001106441,"about_ca_system_score_gemma":0.00001551581,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001406625,"about_ca_topic_score_gemma":0.000002747545,"domain_scores_codex":[0.9992839,0.000006273885,0.0002407521,0.0002427029,0.00005575953,0.0001706902],"domain_scores_gemma":[0.9995272,0.0001295786,0.00008740763,0.0001630828,0.00004107097,0.00005167626],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001164788,0.000007768833,0.0001056642,0.007569267,0.0002529775,5.12686e-7,0.001441451,0.001036111,0.9855166,0.0001938444,0.002080142,0.001679178],"study_design_scores_gemma":[0.0005955747,0.00006427418,0.0002403624,0.0003277502,0.0001173542,5.152157e-7,0.000174939,0.004670616,0.9842695,0.001119904,0.008084168,0.000335064],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9910055,0.006568961,0.0002338636,0.00008647383,0.0006856589,0.0006198046,0.00009493351,0.0001464304,0.000558357],"genre_scores_gemma":[0.9963278,0.0002208933,0.002497899,0.00003724965,0.0004510438,0.0002979066,0.00007349421,0.00006515948,0.00002859372],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007241517,"threshold_uncertainty_score":0.8373353,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03679539692052556,"score_gpt":0.2550274557566,"score_spread":0.2182320588360744,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}