{"id":"W4231684934","doi":"10.1149/ma2008-02/24/1888","title":"Ti Source Precursors for Atomic Layer Deposition of TiO2, STO and BST","year":2008,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Air Liquide (Canada)","funders":"","keywords":"Atomic layer deposition; Layer (electronics); Deposition (geology); Materials science; Layer by layer; Nanotechnology; Chemical engineering; Geology; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001192169,0.00009247766,0.0001351547,0.00003640466,0.0000532594,0.0000160975,0.00004456784,0.00006386481,0.000006620627],"category_scores_gemma":[0.00003432694,0.00009419244,0.00002570346,0.00002937286,0.00002104822,0.00008305658,0.000009141612,0.00004222472,0.000006649419],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001356975,"about_ca_system_score_gemma":0.000008470153,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007042627,"about_ca_topic_score_gemma":0.000008188562,"domain_scores_codex":[0.9994739,0.00000756998,0.0002059885,0.0001045205,0.00006896733,0.0001390223],"domain_scores_gemma":[0.9997005,0.00008670301,0.00006457248,0.00007917476,0.00002650668,0.00004247059],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001254562,0.00001169126,0.0009367542,0.0002369289,0.0000186765,0.000001581376,0.0006454291,0.02454004,0.9729373,0.00000333703,0.0005197437,0.0001360038],"study_design_scores_gemma":[0.0002774418,0.00002446547,0.01186561,0.0001182222,0.00001671611,0.00002592917,0.00007542548,0.002843589,0.9833479,0.0000509632,0.001217536,0.0001362085],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9942852,0.0004919074,0.00002148406,0.000009684375,0.0002414801,0.0001130947,0.00001035542,0.000114742,0.004712064],"genre_scores_gemma":[0.9982569,0.00004050303,0.001483306,0.00001092017,0.0001220337,0.00000837369,0.000008638169,0.00002618611,0.00004320411],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02169646,"threshold_uncertainty_score":0.3841056,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01979500470084515,"score_gpt":0.2242154428838186,"score_spread":0.2044204381829734,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}