{"id":"W4232483981","doi":"10.26434/chemrxiv.14206619","title":"Cobalt Metal ALD: Understanding the Mechanism and Role of Zink Alkyl Precursors as Reductants for Low Resistivity Co Thin Films","year":2021,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Irish Centre for High-End Computing; Partnership for Advanced Computing in Europe AISBL; Deutscher Akademischer Austauschdienst; Science Foundation Ireland","keywords":"Alkyl; Atomic layer deposition; Chemistry; Reactivity (psychology); Thin film; Cobalt; Substrate (aquarium); Metal; Inorganic chemistry; Materials science; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001171327,0.0002726442,0.0002002707,0.000177015,0.0001460296,0.000446909,0.0003496735,0.0002641081,0.0008262939],"category_scores_gemma":[0.0001459641,0.0001353472,0.0001396987,0.000107319,0.0002655883,0.0006653653,0.000165929,0.0003808482,0.0002775085],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004021431,"about_ca_system_score_gemma":0.0001876673,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001116044,"about_ca_topic_score_gemma":0.0009968588,"domain_scores_codex":[0.99993,0.000005837177,0.000004018369,0.00002034009,0.00002107371,0.00001864273],"domain_scores_gemma":[0.9999429,0.00001349031,0.00001774005,0.000009123961,0.0000116667,0.000005092585],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007641521,0.00002456891,0.0008241627,0.0004302688,0.000009439811,0.0001884949,0.00009006814,0.0007154159,0.9870359,0.00306637,0.00006205856,0.007476945],"study_design_scores_gemma":[0.000004825946,0.00005308635,0.001299176,0.0000123081,0.00001611256,0.0002427995,0.00007726206,0.007110971,0.9863826,0.0005163432,0.004278301,0.000006197264],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.890072,0.02686251,0.07219841,0.0007801891,0.00009825361,0.0001108809,0.0002265628,0.0003571349,0.00929413],"genre_scores_gemma":[0.9789398,0.007149052,0.01135994,0.00005878673,0.00002978368,0.00001829304,0.00009186294,0.00002560731,0.00232686],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001116044,"threshold_uncertainty_score":0.002917707,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03057704564686531,"score_gpt":0.2537667669595481,"score_spread":0.2231897213126828,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}