{"id":"W4233142695","doi":"10.1117/3.322162.ch6","title":"Yield","year":2009,"lang":"en","type":"book-chapter","venue":"SPIE eBooks","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Resist; Overlay; Contamination; Yield (engineering); Wafer; Process engineering; Process (computing); Lithography; Reliability engineering; Particulates; Engineering; Computer science; Environmental science; Materials science; Nanotechnology; Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00004133689,0.0003689523,0.0002909465,0.0001899539,0.00003162902,0.00001849994,0.000246029,0.0003382442,0.0003084009],"category_scores_gemma":[0.000002932934,0.0004066076,0.0001614281,0.000007321127,0.00005716922,0.00002538117,0.00003444088,0.0004719119,0.00007492275],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006100418,"about_ca_system_score_gemma":0.0000095535,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001144752,"about_ca_topic_score_gemma":0.000004093732,"domain_scores_codex":[0.9990861,7.091998e-7,0.0002540215,0.0002281421,0.0001857995,0.0002452548],"domain_scores_gemma":[0.9993232,0.00001558359,0.00004792106,0.000522009,0.00002295885,0.00006836288],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000006126444,0.000004732939,0.000002125011,0.0001161607,0.0001827629,0.000105691,0.00004401519,0.00001937705,0.001098652,0.4105519,0.02287414,0.5649943],"study_design_scores_gemma":[0.0000443451,0.00004667172,0.000002758019,0.0002372608,0.00003034456,0.000006726316,6.303126e-7,0.000009640509,0.003830238,0.1601931,0.8351772,0.0004210133],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.00001171835,0.0006046016,0.001363375,0.000003482535,0.0003311469,0.0003029244,0.00002474858,0.001777408,0.9955806],"genre_scores_gemma":[0.002072087,0.000215856,0.01041789,0.0002114735,0.000351728,0.00003810948,0.00001608684,0.0002165796,0.9864602],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.8123031,"threshold_uncertainty_score":0.9998386,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0169155135025818,"score_gpt":0.2247295427440862,"score_spread":0.2078140292415044,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}