{"id":"W4233415102","doi":"10.1109/eumc.2007.4405402","title":"High quality factor micromachined toroid and solenoid inductors","year":2007,"lang":"en","type":"article","venue":"2007 European Microwave Conference","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Asylum, Migration and Integration Fund","keywords":"Inductor; Solenoid; Fabrication; Materials science; Surface micromachining; Q factor; Toroid; Electroplating; Plating (geology); Optoelectronics; Quality (philosophy); CMOS; Ohmic contact; Electrical engineering; Electronic engineering; Engineering; Physics; Nanotechnology; Resonator; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004816369,0.000346398,0.0005214275,0.0002685054,0.0001978617,0.0006617091,0.0005297576,0.0003227225,0.001967266],"category_scores_gemma":[0.0006857946,0.0002040579,0.0001934855,0.0003311725,0.0002655572,0.0005315707,0.000224163,0.0003614574,0.0007763806],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005873733,"about_ca_system_score_gemma":0.0004176033,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004720049,"about_ca_topic_score_gemma":0.00119728,"domain_scores_codex":[0.9996909,0.0000327349,0.00002066724,0.00005161084,0.00015377,0.00005044746],"domain_scores_gemma":[0.9993634,0.00007757008,0.0001386181,0.0000739221,0.0002676468,0.00007879893],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002511118,0.00002528472,0.0004451755,0.0002692411,0.00002052385,0.0003885748,0.0002109759,0.001717069,0.9764082,0.002701177,0.001689776,0.01587292],"study_design_scores_gemma":[0.0001172997,0.001129121,0.002666466,0.00002874291,0.00004178661,0.0009438731,0.0001446199,0.01199064,0.9351447,0.0006619671,0.04706802,0.00006274074],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6512451,0.003409394,0.3031287,0.0006861558,0.001109178,0.0004425265,0.001017461,0.003698545,0.03526294],"genre_scores_gemma":[0.8493219,0.000723606,0.1359332,0.00006043501,0.00009691958,0.00009225817,0.0002961378,0.000157277,0.01331838],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001967266,"threshold_uncertainty_score":0.006581187,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02871567468209993,"score_gpt":0.2708181179752004,"score_spread":0.2421024432931005,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}