{"id":"W4235261563","doi":"10.1149/ma2018-02/36/1200","title":"Integration Challenges of Flash Lamp Annealed LTPS for High Performance CMOS TFTs","year":2018,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Research & Development Corporation","funders":"","keywords":"Flash-lamp; Materials science; Optoelectronics; Amorphous solid; Amorphous silicon; Dopant Activation; Passivation; Polycrystalline silicon; Annealing (glass); CMOS; Silicon; Dopant; Nanotechnology; Engineering physics; Crystalline silicon; Thin-film transistor; Doping; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004113833,0.0001583633,0.0003929119,0.000154208,0.000305254,0.0006906284,0.0005654745,0.0006749317,0.001079852],"category_scores_gemma":[0.0006578596,0.0001865138,0.0002578441,0.0002287877,0.0001945414,0.0006944874,0.0002937781,0.0005672903,0.0006457318],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007449872,"about_ca_system_score_gemma":0.0004532278,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001299426,"about_ca_topic_score_gemma":0.002109771,"domain_scores_codex":[0.9996592,0.00002274172,0.00001879341,0.00005807772,0.0001947349,0.00004650797],"domain_scores_gemma":[0.9997218,0.00006432197,0.00004970014,0.0000387188,0.00009780852,0.00002758092],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002696359,0.0000157134,0.0003363279,0.0001194178,0.000008399228,0.0001713301,0.000069345,0.0007697722,0.9878159,0.0004795703,0.0002844656,0.00990271],"study_design_scores_gemma":[0.00001819463,0.0006844958,0.006110059,0.00004759397,0.0000512839,0.001170855,0.000226683,0.01278413,0.9553814,0.0006556912,0.02283784,0.00003176273],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9398301,0.01310101,0.03712509,0.001866828,0.0002836249,0.00009351576,0.0003928369,0.0005598513,0.0067471],"genre_scores_gemma":[0.9573246,0.005245455,0.03302936,0.0002401009,0.0001235314,0.00006907664,0.0003107043,0.0001345037,0.003522774],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001299426,"threshold_uncertainty_score":0.005405247,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01874632294359524,"score_gpt":0.2203274626851933,"score_spread":0.2015811397415981,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}