{"id":"W4235305223","doi":"10.1117/3.601520.ch11","title":"Lithography Costs","year":2009,"lang":"en","type":"book-chapter","venue":"SPIE eBooks","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Lithography; Next-generation lithography; Photolithography; Computational lithography; Reticle; X-ray lithography; Manufacturing engineering; Wafer; Computer science; Engineering; Nanotechnology; Materials science; Electrical engineering; Resist; Electron-beam lithography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00007652419,0.0005902501,0.0004487378,0.0004985926,0.00005639715,0.00003742925,0.0003719321,0.0004611075,0.0001624118],"category_scores_gemma":[0.000002437506,0.0006533018,0.0003366817,0.00002573733,0.0001267445,0.00004435231,0.00004872763,0.0006465832,0.00006287297],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000114841,"about_ca_system_score_gemma":0.00001375887,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001854181,"about_ca_topic_score_gemma":0.00000469674,"domain_scores_codex":[0.9985405,0.000002656,0.0003906396,0.0003727174,0.0003032894,0.0003902418],"domain_scores_gemma":[0.9989512,0.00001888973,0.00008560861,0.0007628481,0.00005085835,0.0001305769],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000006979805,0.00000599791,0.000007169143,0.00008009367,0.0002039909,0.0000763294,0.00002696492,0.000005416251,0.0003303107,0.2544016,0.007623416,0.7372317],"study_design_scores_gemma":[0.0001133223,0.00007771015,0.00001332748,0.0003088269,0.00005748536,0.00001085341,0.000001140438,0.00001039787,0.001650222,0.1112442,0.8858569,0.0006555971],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.00002397403,0.002167061,0.001154621,0.000003589064,0.0004294063,0.000554594,0.00006674568,0.002598605,0.9930014],"genre_scores_gemma":[0.004546133,0.001630587,0.0407512,0.0005077503,0.0008465544,0.0001814808,0.0001166798,0.0007584454,0.9506612],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.8782336,"threshold_uncertainty_score":0.9995918,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00948581999928933,"score_gpt":0.2232235493031515,"score_spread":0.2137377293038621,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}