{"id":"W4236088595","doi":"10.26434/chemrxiv.13129910","title":"Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design","year":2020,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Linköpings Universitet; Stiftelsen för Strategisk Forskning","keywords":"Impurity; Atomic layer deposition; Nitride; Deposition (geology); Layer (electronics); Materials science; Aluminium; Thin film; Characterization (materials science); Chemical engineering; Nanotechnology; Chemical vapor deposition; Metallurgy; Chemistry; Organic chemistry; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002032085,0.0005185994,0.0006886731,0.0001275482,0.00004975183,0.0002365112,0.0005647072,0.0004754319,0.000136905],"category_scores_gemma":[0.00008894782,0.0005613331,0.0001574439,0.0002334701,0.00005940483,0.0001720045,0.0003255921,0.0006308918,0.00008767948],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002051135,"about_ca_system_score_gemma":0.00009107979,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002972211,"about_ca_topic_score_gemma":0.00001824059,"domain_scores_codex":[0.9979337,0.00007457115,0.0006129013,0.0006166324,0.0002279577,0.000534215],"domain_scores_gemma":[0.9990387,0.0001696701,0.0001249296,0.0005112531,0.00004954889,0.0001059112],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009653798,0.00007577289,0.0006765015,0.003166444,0.0001946422,0.0001450068,0.003200674,0.0312451,0.9543809,0.0001387048,0.006549309,0.0001304118],"study_design_scores_gemma":[0.0005348679,0.000016251,0.0005762466,0.0008274384,0.00005905231,0.000006858871,0.0001096152,0.01197917,0.9830387,0.001738675,0.0003766854,0.0007364809],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9891043,0.004195247,0.002786514,0.00006688031,0.001716907,0.0007697908,0.00002156265,0.0006600618,0.000678749],"genre_scores_gemma":[0.9951704,0.0004778633,0.003329076,0.0001085243,0.0004499478,0.0002178684,0.00008152562,0.0001386999,0.00002615138],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02865776,"threshold_uncertainty_score":0.9996838,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03867436090198008,"score_gpt":0.2477247183819567,"score_spread":0.2090503574799766,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}