{"id":"W4237705228","doi":"10.1007/978-1-4020-8021-0_8","title":"Design Techniques","year":2004,"lang":"en","type":"book-chapter","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Wafer; Substrate (aquarium); Layer (electronics); Shield; Surface (topology); Materials science; Optoelectronics; Mechanical engineering; Nanotechnology; Engineering; Geology; Geometry; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003915682,0.001094738,0.000519622,0.001129555,0.0007961474,0.001693351,0.00141672,0.0008349403,0.05475596],"category_scores_gemma":[0.0008093358,0.0004989518,0.0005441821,0.0008336739,0.0005633982,0.001755278,0.001140401,0.001220978,0.03926264],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000652328,"about_ca_system_score_gemma":0.0008095379,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005642798,"about_ca_topic_score_gemma":0.0008818746,"domain_scores_codex":[0.9994144,0.00005360449,0.00002274563,0.0001003918,0.0003625492,0.00004629914],"domain_scores_gemma":[0.9997048,0.00004713901,0.00001471959,0.0001022969,0.000117809,0.00001307998],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00004815034,0.00006692106,0.0001444658,0.0006515371,0.00002566632,0.000103125,0.0002655024,0.003254272,0.03672783,0.2185749,0.08883493,0.6513028],"study_design_scores_gemma":[0.00001305961,0.00005371379,0.0001887783,0.0001231794,0.00001988288,0.0004337516,0.00004783193,0.004242458,0.01700737,0.03350461,0.944346,0.00001939222],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"methods","genre_scores_codex":[0.002612506,0.00614869,0.4517637,0.0007909653,0.001275525,0.0002196492,0.0003984099,0.002982764,0.5338078],"genre_scores_gemma":[0.0427535,0.01043486,0.2031516,0.0009755596,0.0005269826,0.0005280861,0.001201266,0.001307444,0.7391207],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.05475596,"threshold_uncertainty_score":0.1831769,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02029627106377921,"score_gpt":0.2127229893876505,"score_spread":0.1924267183238713,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}