{"id":"W4237818939","doi":"10.1149/ma2011-02/26/1855","title":"ALD and AVD Grown Perovskite-type Dielectrics for Metal-Insulator-Metal Applications","year":2011,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Dielectric materials and actuators","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Materials science; Dielectric; Metal; Perovskite (structure); Insulator (electricity); Metal-insulator-metal; High-κ dielectric; Optoelectronics; Nanotechnology; Chemical engineering; Electrical engineering; Metallurgy; Capacitor; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000121564,0.0002017923,0.0001784317,0.0001372282,0.0003027,0.0004204442,0.0003439992,0.0002194291,0.003437844],"category_scores_gemma":[0.0002552302,0.0001769051,0.0001845791,0.0001536279,0.0001178376,0.0003514103,0.0001602942,0.0003689848,0.0006622252],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002744609,"about_ca_system_score_gemma":0.0001546477,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008416449,"about_ca_topic_score_gemma":0.001654961,"domain_scores_codex":[0.9999056,0.000006380676,0.000003858732,0.00001799063,0.00004287783,0.00002329003],"domain_scores_gemma":[0.9999425,0.0000112621,0.000006546556,0.000008950454,0.00002167468,0.000009014392],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001324514,0.00002209826,0.0001809901,0.0002116689,0.00001022397,0.0000839472,0.00002418634,0.0001603029,0.9937578,0.0003974022,0.001019484,0.003999403],"study_design_scores_gemma":[0.00002194676,0.0001165843,0.001034077,0.000005495383,0.00001341869,0.0001111681,0.0000464306,0.001207502,0.9887576,0.000112279,0.008568276,0.000005373307],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9666571,0.004377738,0.007806859,0.0005500326,0.0006985451,0.00008358756,0.001836007,0.0005610618,0.01742909],"genre_scores_gemma":[0.9754536,0.00149424,0.007274738,0.00007214697,0.00004619604,0.000033207,0.00110354,0.00008857776,0.01443371],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003437844,"threshold_uncertainty_score":0.01150072,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01678995762089538,"score_gpt":0.2106797673287324,"score_spread":0.193889809707837,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}