{"id":"W4239076751","doi":"10.1007/978-1-4020-8021-0_16","title":"MUSiC® Process","year":2004,"lang":"en","type":"book-chapter","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Silicon carbide; Materials science; Surface micromachining; Process (computing); Computer science; Composite material; Fabrication; Programming language","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005446718,0.0009768286,0.0005510006,0.001559829,0.001538772,0.003904488,0.001391306,0.001327332,0.2658634],"category_scores_gemma":[0.001212211,0.0004746432,0.0006109672,0.001128299,0.000778126,0.002592952,0.002088698,0.001402882,0.149638],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008453591,"about_ca_system_score_gemma":0.001349112,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001892127,"about_ca_topic_score_gemma":0.002122854,"domain_scores_codex":[0.9992317,0.00004294175,0.00002599621,0.000138692,0.0004991678,0.00006145317],"domain_scores_gemma":[0.9997169,0.00004315133,0.00001335688,0.0000837219,0.0001150664,0.00002767205],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000185003,0.00009545017,0.0001442609,0.0003692202,0.000009842256,0.0002121734,0.0006737598,0.0005261779,0.01504895,0.1554695,0.2168329,0.6104327],"study_design_scores_gemma":[0.00001764244,0.00003844815,0.0001779069,0.00004920736,0.000005556959,0.0001466779,0.000104418,0.0005910222,0.006286273,0.007291586,0.9852805,0.000010816],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"methods","genre_scores_codex":[0.00167209,0.000483889,0.03753427,0.0003573498,0.0006953357,0.000263128,0.0006358599,0.003133889,0.9552242],"genre_scores_gemma":[0.009131468,0.0003912427,0.01060365,0.0002626263,0.0001185243,0.0001236166,0.000760086,0.0007378255,0.9778709],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.2658634,"threshold_uncertainty_score":0.8894016,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01407732453699993,"score_gpt":0.1863432400494158,"score_spread":0.1722659155124158,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}