{"id":"W4240192342","doi":"10.1149/ma2015-02/19/877","title":"Combined Surface-Activated Bonding Technique for Low-Temperature Cu/SiO<sub>2</sub> Hybrid Bonding","year":2015,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optech (Canada)","funders":"","keywords":"Anodic bonding; Materials science; X-ray photoelectron spectroscopy; Direct bonding; Annealing (glass); Surface roughness; Wafer bonding; Wafer; Chemical engineering; Composite material; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0007442572,0.0004234981,0.0004361042,0.0001964176,0.0001988947,0.0001420755,0.0003351729,0.0003716038,0.000001987104],"category_scores_gemma":[0.0007770159,0.0004373198,0.0001143029,0.0003573452,0.00006305833,0.0003053293,0.00009270363,0.0006783722,0.00003675268],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002425658,"about_ca_system_score_gemma":0.00005721728,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001738402,"about_ca_topic_score_gemma":0.000003265042,"domain_scores_codex":[0.9980409,0.00002371383,0.0005157059,0.0003982521,0.000277956,0.0007434382],"domain_scores_gemma":[0.9988688,0.000230202,0.0001570828,0.0004030727,0.0001429975,0.0001978532],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002746574,0.00003227276,0.0001555634,0.0001466801,0.00004270291,0.00004549748,0.00009002766,0.03655256,0.9515499,0.00007387969,0.0111528,0.0001306025],"study_design_scores_gemma":[0.0006538773,0.00008058757,0.0002226196,0.0004520374,0.00002251166,0.00003320952,0.0002456017,0.001164328,0.9936327,0.0009894941,0.001989688,0.0005132832],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9858758,0.0002198213,0.0001546786,0.0001904771,0.0007316615,0.0007030762,0.00002982512,0.002995252,0.009099371],"genre_scores_gemma":[0.9944271,0.00001911066,0.004987057,0.0000241773,0.0001383363,0.00009418846,0.00006305095,0.0001403416,0.0001066281],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04208282,"threshold_uncertainty_score":0.9998078,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01499494408155687,"score_gpt":0.2241471518021592,"score_spread":0.2091522077206023,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}