{"id":"W4242705914","doi":"10.1109/ccece.1999.804976","title":"Measurement of MEMS Displacements and Frequencies Using Laser Interferometry","year":2005,"lang":"en","type":"article","venue":"","topic":"Advanced Measurement and Metrology Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Dalhousie University","funders":"","keywords":"Interferometry; Microelectromechanical systems; Laser; Optics; Materials science; Physics; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002108434,0.00009580296,0.0001297946,0.00009012903,0.00002131782,0.000005672359,0.00005202859,0.00004141752,0.00005237514],"category_scores_gemma":[0.00001653389,0.00008474998,0.00002092498,0.0000736128,0.00003442532,0.0001365368,0.00001909627,0.00005840222,0.000001246156],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008614984,"about_ca_system_score_gemma":0.000004316526,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008713638,"about_ca_topic_score_gemma":0.00003072805,"domain_scores_codex":[0.9994435,0.000006387467,0.0001636805,0.00008424496,0.0001667593,0.0001354764],"domain_scores_gemma":[0.9997928,0.000005414033,0.00002100407,0.00009810929,0.00004821552,0.00003442191],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009407728,0.00002468768,0.004607806,0.00005764333,0.00006464295,3.694051e-7,0.00005342189,0.001158403,0.984362,0.00007159542,0.0003719114,0.009218108],"study_design_scores_gemma":[0.000264892,0.00004504208,0.0006575449,0.00004759809,0.00002425849,0.000002027707,0.000046716,0.002386682,0.9942573,0.0001483061,0.002000352,0.000119285],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8306884,0.001322782,0.1592441,0.00002405603,0.00009790001,0.0001367341,0.000001869851,0.0002405538,0.008243579],"genre_scores_gemma":[0.9814038,0.0001011319,0.01836591,0.00002406516,0.00002451772,0.000005337428,4.62246e-7,0.00001237812,0.00006242233],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1507154,"threshold_uncertainty_score":0.3456004,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03507161940224041,"score_gpt":0.2576062381520256,"score_spread":0.2225346187497852,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}