{"id":"W4244370689","doi":"10.1149/ma2008-02/37/2417","title":"Effect of Ion Implantation and Anneals on Fully-strained SiC and SiC:P Films using Multiple Characterization Techniques","year":2008,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Silicon Carbide Semiconductor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Characterization (materials science); Materials science; Ion implantation; Ion; Optoelectronics; Annealing (glass); Engineering physics; Nanotechnology; Electronic engineering; Chemistry; Metallurgy; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000288429,0.0004270302,0.0003356345,0.0001851293,0.0003993219,0.0004817296,0.0003881886,0.0005233191,0.002318704],"category_scores_gemma":[0.0006259206,0.0003258403,0.0002313035,0.0002327407,0.0002872846,0.0005113186,0.0002200681,0.000311222,0.0002850901],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002621353,"about_ca_system_score_gemma":0.0002482841,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001113103,"about_ca_topic_score_gemma":0.002848296,"domain_scores_codex":[0.999774,0.00002516788,0.00001931504,0.00006108936,0.00005767956,0.00006272573],"domain_scores_gemma":[0.9994704,0.0002591946,0.00007711296,0.00006985096,0.0000947372,0.00002873269],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004708843,0.00002324059,0.0003086238,0.00005646869,0.00001715091,0.00007051078,0.00005587499,0.0001980525,0.997319,0.00002676826,0.00007925693,0.001374176],"study_design_scores_gemma":[0.00001377909,0.0003103919,0.003806727,0.000004868051,0.00001603098,0.00005868819,0.0000404496,0.0007253785,0.9945427,0.00001266036,0.0004601247,0.000008152902],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9964345,0.0006727397,0.0007842355,0.00006024103,0.00003782283,0.00002512856,0.0002271158,0.00006775407,0.001690494],"genre_scores_gemma":[0.9967944,0.0003496035,0.00107576,0.00003569424,0.00001072799,0.00001794343,0.0001565207,0.00005135845,0.001508023],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002318704,"threshold_uncertainty_score":0.007756829,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01571460858820235,"score_gpt":0.2380716178040362,"score_spread":0.2223570092158339,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}