{"id":"W4248110443","doi":"10.1149/ma2014-02/31/1654","title":"A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime","year":2014,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Hydrogen; Doping; Materials science; Proton; Annealing (glass); Radiation damage; Irradiation; Radiation; Getter; Silicon; Range (aeronautics); Helium; Atomic physics; Analytical Chemistry (journal); Optoelectronics; Chemistry; Optics; Nuclear physics; Physics; Metallurgy; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009434412,0.0001050078,0.000152211,0.0001328457,0.00003370679,0.00002421957,0.0001972001,0.00007719803,0.000003356937],"category_scores_gemma":[0.0006298619,0.00008422989,0.00002614735,0.0002588122,0.00001140869,0.0000480038,0.00003520896,0.0001803796,0.00001651017],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002993193,"about_ca_system_score_gemma":0.00001874334,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001383385,"about_ca_topic_score_gemma":0.00006534343,"domain_scores_codex":[0.9992102,0.0000552396,0.0002748876,0.0001358749,0.0001208733,0.0002029041],"domain_scores_gemma":[0.9993416,0.000307274,0.00006437442,0.0002244139,0.00001492335,0.00004742961],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003863283,0.00003486362,0.003570312,0.0002553792,0.00001558392,0.000009894421,0.002332865,0.4956999,0.4660671,0.0002786712,0.0003150797,0.03138171],"study_design_scores_gemma":[0.0005682012,0.00006842317,0.04873901,0.0003271539,0.00001081023,0.00001271249,0.000331011,0.01691094,0.9306929,0.0007426309,0.001381113,0.0002151102],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.982863,0.00005093261,0.002131658,0.000148767,0.00007911136,0.0003900358,7.059475e-7,0.0002536938,0.01408207],"genre_scores_gemma":[0.9804296,0.00000560233,0.01942841,0.00002798001,0.00003651733,0.00002840448,0.00000126861,0.00001547212,0.00002667968],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.478789,"threshold_uncertainty_score":0.3434795,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01126989662298435,"score_gpt":0.2569929741551189,"score_spread":0.2457230775321345,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}