{"id":"W4252436839","doi":"10.1149/ma2014-02/31/1652","title":"Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon","year":2014,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Materials science; Silicon; Annealing (glass); Proton; Irradiation; Doping; Hydrogen; Semiconductor; Analytical Chemistry (journal); Optoelectronics; Chemistry; Nuclear physics; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003926691,0.000262843,0.0003052795,0.0001820518,0.0000746416,0.00008462842,0.0001672393,0.0003458658,0.000005846929],"category_scores_gemma":[0.0004226489,0.0002550586,0.00003247662,0.0001937176,0.00004541297,0.0001146212,0.00004948647,0.0005193616,0.00002834891],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000437321,"about_ca_system_score_gemma":0.00001050187,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001356851,"about_ca_topic_score_gemma":0.0001865337,"domain_scores_codex":[0.998763,0.00004443381,0.0003203871,0.0003032227,0.0001367435,0.0004321872],"domain_scores_gemma":[0.9993485,0.000194296,0.00006087803,0.0002804745,0.00002414463,0.00009174956],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004269526,0.00006781883,0.03456258,0.0005447486,0.00003582739,0.00009620584,0.0005137789,0.0658206,0.8941019,0.0000967473,0.0002418192,0.003875286],"study_design_scores_gemma":[0.001263912,0.00007079595,0.3951575,0.0002458252,0.00001129749,0.00003128787,0.0001501701,0.01156675,0.5902963,0.000367646,0.0004144086,0.0004241193],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9953217,0.0003080675,0.000002784509,0.00006272081,0.0002533987,0.0004129609,0.00000513657,0.000858096,0.002775121],"genre_scores_gemma":[0.9990427,0.00007237156,0.0006186035,0.00004111509,0.0000737505,0.0000556803,0.00001899503,0.00004742319,0.00002930193],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.360595,"threshold_uncertainty_score":0.9999902,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00966490118656046,"score_gpt":0.2074238933646055,"score_spread":0.1977589921780451,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}