{"id":"W4252626466","doi":"10.1149/ma2013-02/30/2121","title":"Cryogenic Single-Component Micro-Nano Solid Nitrogen Particle Production Using Laval Nozzle for Physical Resist Removal-Cleaning Process","year":2013,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Electrohydrodynamics and Fluid Dynamics","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Nozzle; Resist; Component (thermodynamics); Materials science; Nano-; Nanotechnology; Particle (ecology); Process (computing); Process engineering; Engineering; Mechanical engineering; Composite material; Computer science; Physics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001361217,0.0001519245,0.000216406,0.00007306138,0.0002228213,0.0002318239,0.0002512565,0.0001789232,0.001202146],"category_scores_gemma":[0.000146175,0.0001105286,0.0001592159,0.00007646555,0.0001890314,0.0002516149,0.0002295415,0.0002356556,0.0004256125],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003325333,"about_ca_system_score_gemma":0.0002303784,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006772591,"about_ca_topic_score_gemma":0.001384615,"domain_scores_codex":[0.9999331,0.000003349066,0.000002126264,0.00001958355,0.00003092149,0.00001086305],"domain_scores_gemma":[0.9999229,0.00001375478,0.00001449832,0.00001772726,0.00002278826,0.000008340157],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002078024,0.00000569923,0.0001179429,0.00002329446,0.000001467387,0.00002716501,0.00001605423,0.0001176885,0.9984836,0.0001094103,0.00007234449,0.001004566],"study_design_scores_gemma":[0.00000584358,0.00005692772,0.0008797543,0.000001908893,0.000003051392,0.00004898588,0.00001197786,0.001438359,0.9963639,0.00002584069,0.00116084,0.00000261561],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9813666,0.0003932615,0.014008,0.0001182217,0.00005963857,0.000051027,0.0002843805,0.0002146541,0.003504152],"genre_scores_gemma":[0.9874623,0.0001571855,0.009940711,0.00001430323,0.000006582845,0.00002464621,0.0001654568,0.00004916198,0.002179652],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001202146,"threshold_uncertainty_score":0.004021525,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0130096353583588,"score_gpt":0.2310850568770646,"score_spread":0.2180754215187058,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}