{"id":"W4253289787","doi":"10.1002/9783527808465.emc2016.5721","title":"Electron beam lithography for the realization of electron beam vortices with large topological charge ( L=1000ħ)","year":2016,"lang":"en","type":"other","venue":"European Microscopy Congress 2016: Proceedings","topic":"Orbital Angular Momentum in Optics","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Max Planck - University of Ottawa Centre for Extreme and Quantum Photonics; University of Ottawa","funders":"","keywords":"Electron-beam lithography; Optics; Holography; Electron holography; Electron; Lithography; Aperture (computer memory); Physics; Wavefront; Beam (structure); Electron optics; Realization (probability); Diffraction; Angular momentum; Cathode ray; Materials science; Resist; Nanotechnology; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002497125,0.0003045543,0.000193089,0.0004327319,0.0002074461,0.0003175618,0.0002985351,0.0002734632,0.002377254],"category_scores_gemma":[0.0003681061,0.0001340957,0.0001246807,0.0002975588,0.0002890189,0.0003380539,0.00034546,0.00036877,0.0006815272],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002948424,"about_ca_system_score_gemma":0.0001494242,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001049481,"about_ca_topic_score_gemma":0.000290071,"domain_scores_codex":[0.9999129,0.00001400134,0.000007311001,0.00001155576,0.00004238882,0.00001181677],"domain_scores_gemma":[0.9998211,0.00006984357,0.00005507872,0.00002826053,0.00001520761,0.00001042778],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005276972,0.00003963456,0.0005179611,0.0002713744,0.000008633287,0.0002059126,0.00006862622,0.0005345246,0.9588042,0.01085305,0.001775434,0.02686776],"study_design_scores_gemma":[0.00003350427,0.0001318992,0.00173044,0.00004761091,0.000008361741,0.0005207181,0.00002960917,0.005280345,0.968848,0.001288337,0.02206816,0.00001297151],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6172522,0.01289446,0.3329411,0.001132981,0.0005993268,0.000404363,0.0009549234,0.001484858,0.03233592],"genre_scores_gemma":[0.7414327,0.002414394,0.2501345,0.0001760935,0.00006087092,0.0001663659,0.0002796601,0.0001062666,0.005229035],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002377254,"threshold_uncertainty_score":0.00795269,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005433264610080919,"score_gpt":0.2567831677987696,"score_spread":0.2513499031886887,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}