{"id":"W4253686714","doi":"10.1149/ma2014-02/47/1918","title":"The Role of Passivation Layer during Thermal Annealing for Oxide Semiconductor Thin Films","year":2014,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kootenay Association for Science & Technology","funders":"","keywords":"Passivation; Materials science; Thin-film transistor; Annealing (glass); Optoelectronics; Dopant; Oxide thin-film transistor; Doping; Plasma-enhanced chemical vapor deposition; Oxide; Layer (electronics); Nanotechnology; Silicon; Composite material; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004872936,0.0001557209,0.0001619184,0.00005664191,0.0001755259,0.00003955072,0.0002650283,0.000139133,0.000002324654],"category_scores_gemma":[0.0006005631,0.0001296423,0.0000711894,0.00007885262,0.00004584828,0.0001183958,0.0000211485,0.0002219698,0.000005325366],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003692863,"about_ca_system_score_gemma":0.000008872401,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003681582,"about_ca_topic_score_gemma":0.00001476354,"domain_scores_codex":[0.9989959,0.00001823337,0.0003712208,0.000154107,0.0001474546,0.0003130809],"domain_scores_gemma":[0.9990554,0.0004375149,0.0001308589,0.0002872818,0.00005727445,0.00003170668],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006735753,0.000003845139,0.0003003659,0.00005630916,0.00001708705,2.19768e-7,0.0002149149,0.2987263,0.7000299,0.00003940799,0.00004287858,0.0005620923],"study_design_scores_gemma":[0.0001906688,0.00001183993,0.01055904,0.0000946629,0.00001288082,0.000001540194,0.0003383942,0.02234804,0.9642597,0.00030209,0.001734178,0.0001469977],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9938356,0.000419903,0.00003678066,0.00008049937,0.0002718174,0.0001701185,0.00000847773,0.0006614943,0.004515358],"genre_scores_gemma":[0.9960664,0.00001153902,0.00370915,0.000006361202,0.00008652764,0.0000295881,0.000004218831,0.00005000732,0.00003621186],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2763782,"threshold_uncertainty_score":0.5286661,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009084220368336905,"score_gpt":0.2015786224000223,"score_spread":0.1924944020316854,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}