{"id":"W4253781335","doi":"10.1109/tsm.2020.2988317","title":"IEEE Transactions on Semiconductor Manufacturing publication information","year":2020,"lang":"en","type":"article","venue":"IEEE Transactions on Semiconductor Manufacturing","topic":"Manufacturing Process and Optimization","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Canadian Standards Association","funders":"","keywords":"Semiconductor device fabrication; Manufacturing engineering; Computer science; Engineering; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":["insufficient_payload"],"consensus_categories":["insufficient_payload"],"category_scores_codex":[0.0007559378,0.0009337906,0.001181404,0.002273938,0.0007446379,0.002506209,0.0009706334,0.001477991,0.307059],"category_scores_gemma":[0.001579969,0.0003878562,0.0005514835,0.002970449,0.0002859514,0.001580773,0.0009321029,0.001196123,0.1799167],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007859868,"about_ca_system_score_gemma":0.001743673,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002104722,"about_ca_topic_score_gemma":0.004593935,"domain_scores_codex":[0.9992654,0.00004820808,0.00003751456,0.00006408778,0.0005161921,0.00006860157],"domain_scores_gemma":[0.998781,0.0001617588,0.00004423132,0.0002110169,0.0007164173,0.00008565296],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001108739,0.0001355491,0.0003728536,0.000352413,0.0000171151,0.00006599817,0.00002308589,0.002367437,0.003709456,0.01125722,0.6125913,0.3689966],"study_design_scores_gemma":[0.00001632625,0.00006221858,0.001236804,0.0001453936,0.0000310878,0.0001352013,0.00003379051,0.006824676,0.002734338,0.007437061,0.9813201,0.00002294147],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.006119225,0.0191139,0.05616245,0.007766901,0.03665926,0.000296173,0.008133725,0.0033501,0.8623983],"genre_scores_gemma":[0.02757738,0.01593925,0.01001501,0.0008482855,0.002463072,0.00009538535,0.01020494,0.0007487535,0.9321079],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.692941,"threshold_uncertainty_score":0.9883962,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01989564096123298,"score_gpt":0.2098756242527791,"score_spread":0.1899799832915461,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}