{"id":"W4254235687","doi":"10.7567/jjap.51.01af02","title":"Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System","year":2012,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Lakehead University","funders":"","keywords":"Sapphire; Gallium; Gallium nitride; Chemical vapor deposition; Materials science; Epitaxy; Plasma; Nitride; Root mean square; Analytical Chemistry (journal); Thin film; Atomic force microscopy; Surface roughness; Metalorganic vapour phase epitaxy; Optoelectronics; Deposition (geology); Layer (electronics); Nanotechnology; Chemistry; Optics; Laser; Composite material; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002244065,0.0002159249,0.0003666546,0.00005132394,0.00008875825,0.00006828793,0.0001411554,0.00005388189,0.00004112403],"category_scores_gemma":[0.000002655114,0.000184479,0.0001722005,0.0001631246,0.00002526303,0.0003732877,0.0000185065,0.0001498044,0.000015344],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008940319,"about_ca_system_score_gemma":0.0000607719,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00006261708,"about_ca_topic_score_gemma":4.79686e-7,"domain_scores_codex":[0.9987009,0.00003760138,0.0005187201,0.0001357408,0.0002885539,0.0003185532],"domain_scores_gemma":[0.9988082,0.00006670968,0.000607596,0.0001450665,0.0001919642,0.0001804562],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002368213,0.0001927249,0.000792482,0.00007098166,0.0000590671,9.124518e-7,0.0006927385,0.001754969,0.9950179,0.0009824927,0.00001597722,0.0001829548],"study_design_scores_gemma":[0.0009908654,0.00003133647,0.000156867,0.00007555381,0.0001228476,0.000008541164,0.001044169,0.004872273,0.99229,0.000198695,0.000008596783,0.0002002437],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9902697,0.000005679366,0.008744812,0.000008900694,0.0002640512,0.0001729613,0.00001357217,0.00001970903,0.0005006524],"genre_scores_gemma":[0.9955558,2.426019e-7,0.002676946,0.00004137248,0.001645261,0.00001648263,0.00003394968,0.00002783242,0.000002096275],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006067866,"threshold_uncertainty_score":0.7522836,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01181795387572699,"score_gpt":0.2253342345649325,"score_spread":0.2135162806892055,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}