{"id":"W4254235687","doi":"10.7567/jjap.51.01af02","title":"Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System","year":2012,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Lakehead University","funders":"","keywords":"Sapphire; Gallium; Gallium nitride; Chemical vapor deposition; Materials science; Epitaxy; Plasma; Nitride; Root mean square; Analytical Chemistry (journal); Thin film; Atomic force microscopy; Surface roughness; Metalorganic vapour phase epitaxy; Optoelectronics; Deposition (geology); Layer (electronics); Nanotechnology; Chemistry; Optics; Laser; Composite material; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001077564,0.0002875822,0.0003808115,0.0002152402,0.0002605941,0.0003268783,0.000423338,0.0003495459,0.0007318342],"category_scores_gemma":[0.00007705935,0.00027605,0.0001855874,0.0001786642,0.0001323687,0.000270401,0.0002553519,0.0003288905,0.0004585832],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002850947,"about_ca_system_score_gemma":0.000261091,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001008148,"about_ca_topic_score_gemma":0.002431442,"domain_scores_codex":[0.9998603,0.000006255864,0.000006907869,0.0000444045,0.00006030224,0.00002185423],"domain_scores_gemma":[0.9999545,0.000007349398,0.00001050015,0.00001092112,0.000008973962,0.000007799733],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005129941,0.000003348648,0.00007399866,0.00001346859,0.000001916331,0.00002158139,0.000006299317,0.00002876716,0.9991,0.00003843169,0.00003370877,0.0006734935],"study_design_scores_gemma":[0.00001638644,0.0001089343,0.002913692,0.000003371441,0.00001066432,0.0002949968,0.00001054321,0.00142,0.9897398,0.00003011034,0.00544205,0.000009531417],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9722206,0.001227138,0.02102423,0.0001161777,0.0001134341,0.000123214,0.0003754223,0.000986585,0.003813184],"genre_scores_gemma":[0.9501883,0.0009960004,0.04316579,0.00005379213,0.00003531608,0.0001174355,0.0005156755,0.00009496173,0.004832755],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001008148,"threshold_uncertainty_score":0.002448201,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01181795387572699,"score_gpt":0.2253342345649325,"score_spread":0.2135162806892055,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}