{"id":"W4254963611","doi":"10.32920/ryerson.14644341","title":"A Comparative Analysis Of MEMS Parallel Plate Actuators","year":2021,"lang":"en","type":"preprint","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Microelectromechanical systems; Voltage; Actuator; Software; Deformation (meteorology); Computer science; Capacitor; Mechanical engineering; Electronic engineering; Engineering; Electrical engineering; Materials science; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004207886,0.0004332921,0.0003340081,0.0007080343,0.0003381341,0.0004441877,0.0005759235,0.0005144,0.003489518],"category_scores_gemma":[0.001187515,0.0001791357,0.0004231038,0.0005868501,0.0002491591,0.0004526504,0.0002314277,0.000226661,0.0003846868],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002962823,"about_ca_system_score_gemma":0.0002838458,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004374816,"about_ca_topic_score_gemma":0.0004422004,"domain_scores_codex":[0.9992799,0.00003653622,0.00002460266,0.00008817133,0.0005112559,0.00005946663],"domain_scores_gemma":[0.9993727,0.0002211018,0.0000730156,0.00009464855,0.0002166302,0.00002198332],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0009080903,0.0001079006,0.003329651,0.0007680898,0.0000976599,0.0006165101,0.0001297659,0.05067467,0.8526047,0.001992878,0.000806793,0.08796329],"study_design_scores_gemma":[0.0000452779,0.003407734,0.065391,0.00005412712,0.0001782944,0.001488066,0.0003116304,0.1614652,0.7543558,0.001335068,0.01188601,0.00008173263],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9463454,0.002152847,0.03466377,0.0001147835,0.0001135266,0.00007819176,0.0003417694,0.0003109983,0.01587871],"genre_scores_gemma":[0.9885306,0.0004257733,0.007796202,0.00001540397,0.00001708427,0.00003262035,0.0001988219,0.00002796005,0.002955552],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003489518,"threshold_uncertainty_score":0.01167363,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0291324537471267,"score_gpt":0.282870562986612,"score_spread":0.2537381092394853,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}