{"id":"W4255825137","doi":"10.1109/ias.1998.729834","title":"Removal of NF/sub 3/ from semiconductor process flue gases by tandem packed bed plasma-adsorbent hybrid systems","year":2002,"lang":"en","type":"article","venue":"","topic":"ZnO doping and properties","field":"Materials Science","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Packed bed; Adsorption; Flue gas; Tandem; Plasma; Materials science; Analytical Chemistry (journal); Chemistry; Chemical engineering; Chromatography; Composite material; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001046878,0.0002706677,0.0003899373,0.0001365093,0.0002146721,0.0002247922,0.000356407,0.0003826758,0.0004065963],"category_scores_gemma":[0.0001425964,0.0001427726,0.0002289029,0.0001109605,0.0001270263,0.0002896611,0.0001779703,0.0002436755,0.0002121953],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002147468,"about_ca_system_score_gemma":0.0001360352,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001344764,"about_ca_topic_score_gemma":0.002710967,"domain_scores_codex":[0.9999032,0.000009137295,0.000004265237,0.00002672256,0.00004041391,0.00001618149],"domain_scores_gemma":[0.9999325,0.00001952256,0.00001264247,0.000006395731,0.00002035151,0.000008505011],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003121642,0.000008914071,0.0001426956,0.00001797439,0.00000454884,0.00001491345,0.000009989496,0.0001576664,0.9972446,0.00001380802,0.00001363588,0.002340025],"study_design_scores_gemma":[0.00000502874,0.0001327762,0.00102088,0.000001381056,0.00001393785,0.0001241456,0.0000138833,0.002968328,0.9950876,0.00002566917,0.0006025787,0.000003967131],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9818911,0.001082235,0.01643829,0.0000333221,0.00001088412,0.00001150651,0.00003798517,0.0001460546,0.0003486282],"genre_scores_gemma":[0.9760243,0.0005407378,0.02172395,0.00002827037,0.00000799957,0.00001553161,0.0001314725,0.00002743196,0.001500262],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001344764,"threshold_uncertainty_score":0.002673805,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03042944129931454,"score_gpt":0.2252508802629011,"score_spread":0.1948214389635866,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}