{"id":"W4256070630","doi":"10.1007/978-1-4020-8021-0_2","title":"Microfabrication Processes","year":2004,"lang":"en","type":"book-chapter","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Microfabrication; Surface micromachining; Fabrication; Foundation (evidence); Computer science; Nanotechnology; Systems engineering; Materials science; Manufacturing engineering; Engineering; History","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000007741638,0.0001335477,0.0001064771,0.00006996241,0.00001203028,0.00001049506,0.0001095695,0.0002326234,0.0004411034],"category_scores_gemma":[0.000005462211,0.000121172,0.00002379764,0.00001686199,0.00002572479,0.00003129873,0.00001629065,0.0001300135,0.0005348828],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005696508,"about_ca_system_score_gemma":0.00002680542,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001625354,"about_ca_topic_score_gemma":0.000003236247,"domain_scores_codex":[0.9996825,1.320577e-7,0.0000924891,0.00009452528,0.00005232338,0.00007796905],"domain_scores_gemma":[0.9997827,0.000006472685,0.00001557674,0.0001558293,0.00002764177,0.00001180715],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"not_applicable","study_design_scores_codex":[7.809695e-7,0.000004031601,0.000003492938,0.0007889278,0.00008429526,0.00000817564,0.00003527601,0.0003278631,0.0002159487,0.9299861,0.02584511,0.04269996],"study_design_scores_gemma":[0.00008424334,0.0000152893,0.00000657743,0.0001821608,0.00002655618,0.000008153221,0.00000877019,0.00002026871,0.01097651,0.2421059,0.7461528,0.0004127026],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.000008547834,0.002574206,0.004235246,0.00005267159,0.00007449226,0.00007942392,0.000004768702,0.001999115,0.9909715],"genre_scores_gemma":[0.05015923,0.003843296,0.002514295,0.00003409956,0.00007719226,0.00001330216,0.00003812021,0.00008688784,0.9432336],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.7203078,"threshold_uncertainty_score":0.6875015,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01002810277780208,"score_gpt":0.176839950774553,"score_spread":0.1668118479967509,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}