{"id":"W4256577831","doi":"10.26434/chemrxiv.12173640","title":"Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition","year":2020,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Knut och Alice Wallenbergs Stiftelse; Vetenskapsrådet; Stiftelsen för Strategisk Forskning","keywords":"Atomic layer deposition; Epitaxy; Chemical vapor deposition; Materials science; Gallium; Layer (electronics); Deposition (geology); Nanotechnology; Analytical Chemistry (journal); Chemistry; Metallurgy; Biology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00007725228,0.0003509945,0.0004491088,0.00003522581,0.00009837889,0.0002098804,0.0001815024,0.0001825498,0.000373353],"category_scores_gemma":[0.000004450033,0.0003645875,0.0001330364,0.00004326808,0.0000503972,0.00008278431,0.000225246,0.0003197081,0.0000361146],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000405596,"about_ca_system_score_gemma":0.00008149065,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004909614,"about_ca_topic_score_gemma":0.000001961106,"domain_scores_codex":[0.9986664,0.00004306648,0.0003204879,0.0005698147,0.0001233212,0.0002768931],"domain_scores_gemma":[0.9992228,0.00002634779,0.0002594366,0.0002756132,0.00005327736,0.0001625771],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002587553,0.00004411777,0.002976482,0.0002230093,0.0001352843,0.000003327305,0.0002074135,0.00003525416,0.9932828,0.000286965,0.002294329,0.0004851611],"study_design_scores_gemma":[0.0006334667,0.00001945978,0.0002385883,0.0001732429,0.0001919037,0.000002129549,0.0001179688,0.002475143,0.9905035,0.003148773,0.001920557,0.0005752735],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.996994,0.000136525,0.0008349447,0.000133063,0.0007925793,0.0002874429,0.000142091,0.00005418187,0.0006252098],"genre_scores_gemma":[0.9975065,0.00001079655,0.0005408595,0.00009846958,0.001151841,0.0000274018,0.0005513497,0.00005715278,0.00005562629],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002861808,"threshold_uncertainty_score":0.9998806,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02804807996609948,"score_gpt":0.2576150800169891,"score_spread":0.2295670000508896,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}