{"id":"W4281648811","doi":"10.1109/jmems.2022.3172920","title":"Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches","year":2022,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; University of Waterloo; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Mitacs","keywords":"Notation; Wafer; Materials science; Mathematics; Algebra over a field; Nanotechnology; Pure mathematics; Arithmetic","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001837753,0.0003409254,0.0003695639,0.0002783227,0.0003099402,0.0005579165,0.0006509713,0.000827361,0.001404736],"category_scores_gemma":[0.0007506301,0.000161041,0.0002161812,0.0003119986,0.0002349998,0.000359919,0.0002423675,0.0002155173,0.000680509],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003200019,"about_ca_system_score_gemma":0.0001474454,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005085313,"about_ca_topic_score_gemma":0.0008453336,"domain_scores_codex":[0.9996175,0.00002739479,0.00001214276,0.00009376414,0.0002103195,0.00003882635],"domain_scores_gemma":[0.9995444,0.000123581,0.00007136951,0.0001059944,0.0001234786,0.00003118284],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000519802,0.00001630282,0.0005671665,0.00006998691,0.000007879731,0.0001793297,0.0001362863,0.0002053499,0.9956495,0.0001012998,0.0001525937,0.002862351],"study_design_scores_gemma":[0.000008008454,0.0003461289,0.008497804,0.000008931725,0.0000197298,0.0004208596,0.000111416,0.005148095,0.9826797,0.0000397024,0.002710654,0.000009038939],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.987052,0.0006559274,0.009136148,0.00008271757,0.00004423134,0.00005875385,0.0003359244,0.0003851675,0.002249202],"genre_scores_gemma":[0.9933669,0.0001905556,0.004596033,0.00003701339,0.00001208997,0.00004387211,0.0001572234,0.00005951223,0.001536854],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001404736,"threshold_uncertainty_score":0.00469929,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01915953801138301,"score_gpt":0.2066763205156243,"score_spread":0.1875167825042413,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}