{"id":"W4281653917","doi":"10.1088/2399-1984/ac7599","title":"Electron beam lithography on non-planar, suspended, 3D AFM cantilever for nanoscale thermal probing","year":2022,"lang":"en","type":"article","venue":"Nano Futures","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optina Diagnostics (Canada)","funders":"H2020 Marie Skłodowska-Curie Actions; Agence Nationale de la Recherche","keywords":"Resist; Electron-beam lithography; Materials science; Lithography; Nanotechnology; Nanoscopic scale; Planar; Etching (microfabrication); Scanning electron microscope; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009401769,0.0001601291,0.0001181409,0.0001103097,0.0001173398,0.0001601604,0.0002787611,0.0002918633,0.001222331],"category_scores_gemma":[0.0001480354,0.0001604564,0.0001390523,0.00006239798,0.0001844184,0.0001346025,0.0001942954,0.0002594435,0.0003819874],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001639469,"about_ca_system_score_gemma":0.00013384,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004148378,"about_ca_topic_score_gemma":0.00119904,"domain_scores_codex":[0.9998866,0.000008638111,0.000004756776,0.00002445998,0.00005874364,0.00001668443],"domain_scores_gemma":[0.9998879,0.00004039873,0.00001793599,0.00002306205,0.00002237934,0.000008259496],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007571331,0.000004210658,0.00008040398,0.00001628715,0.000001465381,0.00004146016,0.000008234749,0.0001779699,0.9983077,0.0001146753,0.0000452281,0.001194783],"study_design_scores_gemma":[0.00001348927,0.000112088,0.003203491,0.000007764194,0.000005831468,0.0002488805,0.00002409709,0.01133572,0.9827288,0.00009929093,0.002211694,0.000008945623],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9307203,0.0006431604,0.06251512,0.0001622018,0.00008508038,0.00004432041,0.0002667358,0.0004280161,0.00513505],"genre_scores_gemma":[0.9197878,0.0002828769,0.07646989,0.00005186319,0.00001220181,0.00003564379,0.0001436738,0.00003159323,0.003184466],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001222331,"threshold_uncertainty_score":0.004089117,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005315460976452533,"score_gpt":0.2506013579593583,"score_spread":0.2452858969829058,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}