{"id":"W4281653917","doi":"10.1088/2399-1984/ac7599","title":"Electron beam lithography on non-planar, suspended, 3D AFM cantilever for nanoscale thermal probing","year":2022,"lang":"en","type":"article","venue":"Nano Futures","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optina Diagnostics (Canada)","funders":"H2020 Marie Skłodowska-Curie Actions; Agence Nationale de la Recherche","keywords":"Resist; Electron-beam lithography; Materials science; Lithography; Nanotechnology; Nanoscopic scale; Planar; Etching (microfabrication); Scanning electron microscope; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009980676,0.0001711023,0.0001547712,0.00008448381,0.0007295301,0.00004407275,0.000255013,0.00003503045,0.0004789391],"category_scores_gemma":[5.245537e-7,0.0001581987,0.000166531,0.0001932124,0.00002705459,0.00004290625,0.00004772567,0.00019924,0.000005914421],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003507668,"about_ca_system_score_gemma":0.00005572446,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000228208,"about_ca_topic_score_gemma":0.000007692985,"domain_scores_codex":[0.9990192,0.00001772275,0.0001572909,0.0003056882,0.0001407246,0.0003593602],"domain_scores_gemma":[0.9995412,0.00002767465,0.00008933299,0.0002665375,0.00002882358,0.00004648873],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001799461,0.0004872695,0.002244689,0.00002616216,0.0001099567,8.977918e-7,0.0005608272,0.0003147225,0.8175681,0.07283957,0.09333962,0.01232831],"study_design_scores_gemma":[0.0005484505,0.000453175,0.0004510585,0.00001399204,0.00003836531,0.000001393442,0.0003529814,0.00007360281,0.5336744,0.002632814,0.461405,0.0003548446],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9671991,0.0001894301,0.004525449,0.0005271674,0.0003567781,0.002209868,0.0008355274,0.0002068935,0.0239498],"genre_scores_gemma":[0.9940606,0.000002175724,0.002059392,0.0002469475,0.0003644856,0.00128427,0.0002677564,0.00003816632,0.001676243],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3680654,"threshold_uncertainty_score":0.6451156,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005315460976452533,"score_gpt":0.2506013579593583,"score_spread":0.2452858969829058,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}