{"id":"W4283330300","doi":"10.1063/5.0103165","title":"Aluminum air bridges for superconducting quantum devices realized using a single-step electron-beam lithography process","year":2022,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Quantum and electron transport phenomena","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation; CMC Microsystems","keywords":"Microwave; Resonator; Electron-beam lithography; Coplanar waveguide; Superconductivity; Materials science; Josephson effect; Lithography; Electron; Yield (engineering); Cathode ray; Optoelectronics; Physics; Resist; Condensed matter physics; Nanotechnology; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001442458,0.0002444441,0.0001687288,0.0002108744,0.0002408164,0.0003527394,0.0004417565,0.0003505622,0.001541094],"category_scores_gemma":[0.0002578409,0.0001624401,0.0001365755,0.0001452991,0.0002472175,0.0006213529,0.0004073937,0.0003282223,0.000475628],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001471361,"about_ca_system_score_gemma":0.0001237686,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009153257,"about_ca_topic_score_gemma":0.0002712728,"domain_scores_codex":[0.9999021,0.00001353677,0.000006742007,0.00001992859,0.00004083001,0.00001675453],"domain_scores_gemma":[0.9998177,0.00004646568,0.00006465855,0.00003457762,0.00002517147,0.00001160397],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000421822,0.00002486989,0.0001936385,0.0001348581,0.000005045855,0.0001058943,0.00007366338,0.0002394141,0.987967,0.003065174,0.0002695569,0.007878833],"study_design_scores_gemma":[0.00001410554,0.0002644694,0.0008814368,0.000008926098,0.000008097332,0.0001748436,0.00002600412,0.002009836,0.9889591,0.0005285704,0.00711659,0.000007985933],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9263291,0.001002466,0.06462941,0.0001428664,0.0001487041,0.00009700153,0.0001366346,0.0006540633,0.006859756],"genre_scores_gemma":[0.960524,0.0003641857,0.03625635,0.00004887798,0.00002303244,0.00006495195,0.00008322937,0.00005370413,0.002581574],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001541094,"threshold_uncertainty_score":0.005155504,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01982165713645988,"score_gpt":0.2461571010718762,"score_spread":0.2263354439354164,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}