{"id":"W4283581074","doi":"10.11159/ffhmt22.121","title":"Effects of Inlet Flow Rates on Purge Durations in an Atomic Layer Deposition Process","year":2022,"lang":"en","type":"article","venue":"Proceedings of the ... International Conference on Fluid Flow, Heat and Mass Transfer","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Core Research for Evolutional Science and Technology; U.S. Department of Energy; National Science Foundation","keywords":"Purge; Atomic layer deposition; Deposition (geology); Inlet; Layer (electronics); Flow (mathematics); Process (computing); Volumetric flow rate; Materials science; Environmental science; Mechanics; Computer science; Waste management; Geology; Mechanical engineering; Engineering; Physics; Composite material; Operating system","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008127864,0.0001189334,0.0001343252,0.000128239,0.00007002539,0.00003578374,0.0002556407,0.00003816657,0.00002545448],"category_scores_gemma":[0.00001513367,0.0001053731,0.00003874075,0.0001420817,0.00003158537,0.0001394061,0.00001868992,0.0001713506,0.000001275603],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004607053,"about_ca_system_score_gemma":0.00002057486,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005895703,"about_ca_topic_score_gemma":0.000009526898,"domain_scores_codex":[0.9992688,0.000006075458,0.0002151956,0.0001577542,0.000243697,0.0001084978],"domain_scores_gemma":[0.9997213,0.00006091201,0.00001094201,0.00005018875,0.0001206725,0.00003595073],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009677772,0.0001881303,0.001236426,0.000175807,0.00003470072,6.177878e-7,0.0006849127,0.01052094,0.9150366,0.07143976,0.00009982904,0.0004854567],"study_design_scores_gemma":[0.0004560621,0.00009192117,0.001434303,0.000123691,0.00001687525,0.000002318316,0.0001311523,0.3433211,0.6511525,0.003120593,0.00004196394,0.000107572],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9968223,0.00001599737,0.0002925326,0.0007458331,0.0001347414,0.0003335269,0.0001090889,0.00002747552,0.001518505],"genre_scores_gemma":[0.9993399,0.00007905789,0.0001422921,0.0000700918,0.00002462182,0.0002899294,0.00002800153,0.00001464568,0.00001142401],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3328001,"threshold_uncertainty_score":0.4296988,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01271864184380747,"score_gpt":0.2340410314711644,"score_spread":0.221322389627357,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}