{"id":"W4285398846","doi":"10.1149/ma2022-01191052mtgabs","title":"PECVD Silicon Nitride-Based Multilayers with Optimized Mechanical Properties","year":2022,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Materials science; Ellipsometry; Silicon nitride; Silicon oxynitride; Thin film; Chemical vapor deposition; Amorphous solid; Electron cyclotron resonance; Amorphous silicon; Passivation; Refractive index; Optoelectronics; Solar cell; Silicon; Composite material; Crystalline silicon; Nanotechnology; Plasma; Layer (electronics); Chemistry; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001696527,0.0005059087,0.0003089127,0.0002211305,0.0001468405,0.0002604922,0.0003616942,0.0003270476,0.001195248],"category_scores_gemma":[0.0001789863,0.0003002019,0.0001998459,0.000248616,0.0001089984,0.0002501768,0.0001914976,0.0003506254,0.0003120876],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003571647,"about_ca_system_score_gemma":0.0001415828,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008636745,"about_ca_topic_score_gemma":0.001751584,"domain_scores_codex":[0.9998598,0.000006636543,0.00001231766,0.0000319617,0.00005803046,0.00003127256],"domain_scores_gemma":[0.9998887,0.00001336231,0.00004534546,0.00001348787,0.00002453353,0.00001464247],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001274458,0.000007270971,0.00006056731,0.00002676422,0.00000333591,0.00001767509,0.000005513641,0.00008734204,0.9994619,0.00001140113,0.00002387411,0.0002816066],"study_design_scores_gemma":[0.000007817039,0.0001129822,0.001694545,0.000004860357,0.00001610316,0.00006816787,0.000009749832,0.001031056,0.9960531,0.000005731478,0.0009920817,0.000003831447],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9946498,0.0009498561,0.002182891,0.00004115682,0.00003985877,0.00003436198,0.0004971179,0.000113805,0.001491169],"genre_scores_gemma":[0.9801689,0.001245352,0.0141081,0.00005335914,0.00001514141,0.00006662264,0.0008799198,0.00009055946,0.00337204],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001195248,"threshold_uncertainty_score":0.003998518,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01608001714292369,"score_gpt":0.1932311097607345,"score_spread":0.1771510926178108,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}