{"id":"W4285415060","doi":"","title":"III-V/Ge Heterostructure Plasma Etching and Passivation With a Single Plasma Process for Low-Damage Multijunction Solar Cell Fabrication,","year":2021,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Passivation; Fabrication; Materials science; Plasma; Etching (microfabrication); Solar cell; Optoelectronics; Heterojunction; Plasma etching; Plasma cleaning; Nanotechnology; Layer (electronics); Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001587751,0.0002839667,0.0004485524,0.0001517438,0.000386802,0.0004447861,0.0005572625,0.0004768833,0.001020569],"category_scores_gemma":[0.000197055,0.0003731242,0.0002763997,0.0001771568,0.0001586636,0.0003789445,0.0003926923,0.0004585143,0.0003955475],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003366298,"about_ca_system_score_gemma":0.0004100405,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008719375,"about_ca_topic_score_gemma":0.002730323,"domain_scores_codex":[0.9998748,0.000005893943,0.000006662122,0.00004073447,0.00005081074,0.00002105074],"domain_scores_gemma":[0.9999348,0.00001000232,0.00001164477,0.00002093294,0.00001674632,0.000005847027],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000533406,0.00002339704,0.000181659,0.00009046101,0.0000189121,0.00005200007,0.0000528629,0.0003907433,0.9932822,0.0002005513,0.0002638657,0.005390075],"study_design_scores_gemma":[0.00001398113,0.0001488158,0.002807492,0.000007450541,0.00002098458,0.000330357,0.00003743112,0.003372133,0.9902191,0.0001163561,0.002917386,0.000008659518],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9426957,0.003643947,0.04489391,0.0002352065,0.0002634161,0.0001458358,0.0005347535,0.0006053709,0.006981891],"genre_scores_gemma":[0.9451468,0.001212301,0.04668858,0.0000516683,0.00002565917,0.0000771724,0.0003383245,0.0001245767,0.006334909],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001020569,"threshold_uncertainty_score":0.003414154,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009711357205691233,"score_gpt":0.1954488013978667,"score_spread":0.1857374441921755,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}