{"id":"W4285776343","doi":"","title":"Impact of plasma etching process exposure on the integrity of AlN and AlGaN layers integrated in GaN heterojunction transistors (HEMTs)","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Materials science; Etching (microfabrication); Optoelectronics; Heterojunction; Transistor; Plasma etching; Plasma; Wide-bandgap semiconductor; Gallium nitride; Nanotechnology; Electrical engineering; Layer (electronics); Voltage; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001991637,0.0002641818,0.0004434911,0.0001465615,0.0000667816,0.0000882182,0.0004640811,0.0001485539,0.0001355558],"category_scores_gemma":[0.0001126866,0.0001963502,0.0001909,0.0001853972,0.0001226435,0.00008255502,0.0001082177,0.0005970681,0.000001789978],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005938087,"about_ca_system_score_gemma":0.0002303786,"about_ca_topic_candidate":true,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.009279116,"about_ca_topic_score_gemma":0.0007855413,"domain_scores_codex":[0.9970468,0.001694066,0.0004996023,0.000387789,0.0001928898,0.0001788403],"domain_scores_gemma":[0.9974009,0.0005594275,0.0005965466,0.0007842485,0.0006020309,0.0000568695],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"observational","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004347425,0.002793283,0.4569969,0.001646013,0.0009838253,0.000001444484,0.0895464,0.004311326,0.3752315,0.02308357,0.0003003039,0.04467069],"study_design_scores_gemma":[0.001720012,0.00001117254,0.05257467,0.006394852,0.0001304954,0.000001577726,0.003419999,0.01127452,0.9201277,0.003452413,0.0001979674,0.0006946539],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9949095,0.00006246306,0.001375078,0.0003671182,0.0001419949,0.0004531252,0.000173798,0.00001983927,0.002497107],"genre_scores_gemma":[0.9992657,0.00002482919,0.0002534695,0.000008187466,0.00001016001,0.00002643547,0.0002722025,0.00002400671,0.0001150272],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5448962,"threshold_uncertainty_score":0.9973182,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01669895029871735,"score_gpt":0.2493530500359532,"score_spread":0.2326540997372359,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}