{"id":"W4286749310","doi":"","title":"High Aspect Ratio and Low Damage III-V/Ge Heterostructure Via Etching","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Etching (microfabrication); Heterojunction; Materials science; Optoelectronics; Aspect ratio (aeronautics); Germanium; Nanotechnology; Silicon","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.001341782,0.0004778346,0.0005829367,0.0002537616,0.0002118802,0.0006090889,0.0007792165,0.0004678376,0.0002439528],"category_scores_gemma":[0.0001694692,0.0004783259,0.0002093695,0.0002872577,0.0001072442,0.0001984491,0.0004303409,0.001254528,0.00003564328],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001425049,"about_ca_system_score_gemma":0.00008333985,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001494892,"about_ca_topic_score_gemma":0.001516391,"domain_scores_codex":[0.997046,0.001081222,0.0005155909,0.0006776514,0.0003091683,0.0003703545],"domain_scores_gemma":[0.9967563,0.0003561284,0.0002280846,0.001741911,0.000766167,0.0001513923],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0000295615,0.0004409099,0.004592059,0.002565812,0.002897371,0.00006431578,0.05611387,0.06493388,0.6824747,0.1051767,0.0105482,0.07016267],"study_design_scores_gemma":[0.001370112,0.000001052818,0.003749981,0.003100622,0.0004239193,0.00003933936,0.0004106308,0.6086037,0.3669477,0.007896987,0.005305454,0.002150553],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8429105,0.001388358,0.137009,0.000992078,0.0007124274,0.0004461108,0.0001221204,0.0005281859,0.01589131],"genre_scores_gemma":[0.9923719,0.0004581034,0.003729163,0.00007000191,0.00005229476,0.00002213442,0.0008489879,0.00008277201,0.002364699],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5436698,"threshold_uncertainty_score":0.9997668,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005955458515825381,"score_gpt":0.1874544334979719,"score_spread":0.1814989749821465,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}