{"id":"W4287134879","doi":"","title":"Comparison of alignment markers and method for electron-beam lithography on CMOS dies.","year":2021,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Electron-beam lithography; CMOS; Lithography; Materials science; Cathode ray; Optoelectronics; Maskless lithography; Next-generation lithography; Electron; Resist; Nanotechnology; Physics; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009434309,0.0003312562,0.0003272229,0.0006730699,0.0003193683,0.0007460325,0.0008005633,0.0005991805,0.00578458],"category_scores_gemma":[0.003055011,0.0002898318,0.0001576614,0.0005818087,0.0001943595,0.0007568683,0.0005376175,0.0003206646,0.001148718],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003870689,"about_ca_system_score_gemma":0.0005128874,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004979992,"about_ca_topic_score_gemma":0.00148966,"domain_scores_codex":[0.9993646,0.0001226517,0.00004071601,0.00009025061,0.0003297838,0.00005202063],"domain_scores_gemma":[0.9977398,0.001071534,0.0001947074,0.0003962374,0.0005330316,0.00006466265],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.002096554,0.0002034745,0.00595087,0.001614799,0.00009474644,0.0003651367,0.0004515584,0.00722682,0.7021915,0.006656201,0.003461237,0.2696872],"study_design_scores_gemma":[0.00009784785,0.001102626,0.01670932,0.000168728,0.0001063061,0.001364515,0.000363083,0.02904459,0.9200727,0.000752399,0.03014544,0.00007245089],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.4753758,0.01197618,0.4842201,0.0005181125,0.001314387,0.0005511125,0.0009121316,0.004456712,0.0206755],"genre_scores_gemma":[0.7134117,0.002726043,0.2708754,0.00009209842,0.00003947946,0.0001340283,0.0004711777,0.0003483723,0.01190166],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.00578458,"threshold_uncertainty_score":0.0193513,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01358211690570701,"score_gpt":0.2881639184893436,"score_spread":0.2745818015836367,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}