{"id":"W4288103094","doi":"","title":"Patterning Platinum using BEOL industrially compatible processes; Chemical Mechanical Polishing vs. ICP Plasma etching","year":2019,"lang":"en","type":"article","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Chemical-mechanical planarization; Polishing; Etching (microfabrication); Materials science; Platinum; Inductively coupled plasma; Plasma; Plasma etching; Isotropic etching; Metallurgy; Composite material; Nanotechnology; Chemistry; Catalysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002605817,0.0002616385,0.0002830221,0.0003874429,0.0002928938,0.0008524891,0.000476619,0.0005006638,0.002896762],"category_scores_gemma":[0.0005730877,0.0002126589,0.0001407099,0.0004237179,0.0003012355,0.0004590608,0.0002818099,0.0004837755,0.001111169],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002930273,"about_ca_system_score_gemma":0.0002324977,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005085536,"about_ca_topic_score_gemma":0.001253586,"domain_scores_codex":[0.9997861,0.00001636008,0.00001226172,0.00005522158,0.0001080412,0.00002195945],"domain_scores_gemma":[0.9998949,0.00003642417,0.00001713018,0.00001547357,0.00002839824,0.000007715891],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005469037,0.00001219734,0.0001058207,0.0001111826,0.000002700867,0.00005875747,0.00002302053,0.00007969759,0.9899476,0.0005148831,0.000222973,0.00886654],"study_design_scores_gemma":[0.000008236452,0.00006959015,0.0005385929,0.000003633329,0.00000695029,0.0001870417,0.00002658851,0.0008851458,0.9916664,0.0001865479,0.006417849,0.000003394188],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7241917,0.0141959,0.2024671,0.001712224,0.0007709008,0.0004675931,0.0005959173,0.001394347,0.05420431],"genre_scores_gemma":[0.8601096,0.006648985,0.1082956,0.0002471835,0.0000835494,0.00008197944,0.0003488505,0.0003029028,0.02388119],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002896762,"threshold_uncertainty_score":0.009690642,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01634030161646224,"score_gpt":0.2278542822814409,"score_spread":0.2115139806649787,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}