{"id":"W4288263855","doi":"","title":"Pt and Au planarization for the fabrication of microand nano- structures","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Chemical-mechanical planarization; Fabrication; Nano-; Materials science; Nanotechnology; Composite material; Medicine; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002831813,0.0001840774,0.0002588805,0.00005931764,0.0002980923,0.0002744434,0.0006045809,0.0001725727,0.00004530701],"category_scores_gemma":[0.001885983,0.0001414137,0.00008266825,0.0001117439,0.0002429611,0.00008296614,0.0005514869,0.0001747571,0.000005252953],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004246621,"about_ca_system_score_gemma":0.0001755424,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001046537,"about_ca_topic_score_gemma":0.0004350366,"domain_scores_codex":[0.9979264,0.0007929872,0.0004034338,0.0004486448,0.0002318616,0.0001966958],"domain_scores_gemma":[0.9949635,0.002043922,0.0006032776,0.0008989819,0.00143387,0.00005649547],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005006981,0.0001770327,0.005229213,0.0009757614,0.0000561373,1.621507e-7,0.01552151,0.0005250863,0.7485942,0.2039225,0.001542747,0.02340558],"study_design_scores_gemma":[0.0006344711,0.000001889391,0.01485955,0.0009099497,0.000121091,0.000003672694,0.0002683192,0.02726397,0.9321237,0.01799367,0.005402218,0.0004174657],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7209014,0.0008117291,0.2675991,0.005462667,0.0003890054,0.001075956,0.0002217288,0.00006463502,0.00347377],"genre_scores_gemma":[0.9609916,0.0001052947,0.03700348,0.00006242676,0.00002868902,0.00005110917,0.0002082685,0.00002167236,0.001527453],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2400902,"threshold_uncertainty_score":0.5766682,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01245184673522224,"score_gpt":0.2291728967800936,"score_spread":0.2167210500448714,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}