{"id":"W4288263872","doi":"","title":"CMP developments in MEMS foundry: Application to direct wafer bonding process","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Foundry; Wafer; Microelectromechanical systems; Wafer bonding; Die preparation; Process (computing); Chemical-mechanical planarization; Computer science; Manufacturing engineering; Materials science; Engineering; Mechanical engineering; Nanotechnology; Wafer dicing; Polishing; Operating system","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.001899676,0.0003700951,0.0004256399,0.000439281,0.0001088754,0.0002049169,0.001248625,0.0003999781,0.00002155994],"category_scores_gemma":[0.000497721,0.000416286,0.00008512413,0.0006670966,0.00006198871,0.0001395032,0.0008572274,0.0006518585,0.0001731134],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003725513,"about_ca_system_score_gemma":0.0001421168,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002723851,"about_ca_topic_score_gemma":0.0008241606,"domain_scores_codex":[0.9977045,0.0003317373,0.0005059206,0.0006895518,0.0003373776,0.0004308867],"domain_scores_gemma":[0.9973801,0.0003276957,0.0001561452,0.001514512,0.0005188937,0.0001026841],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005400456,0.001271284,0.1051929,0.004493696,0.0006481074,0.00002220087,0.06022922,0.05013578,0.02699035,0.1533553,0.006806516,0.5908006],"study_design_scores_gemma":[0.002052208,0.000001589222,0.0512941,0.01150033,0.0001160612,0.00001655166,0.001525039,0.1163436,0.6328372,0.02168921,0.1582232,0.004400978],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5220932,0.001131946,0.2688849,0.002952637,0.0006459595,0.002093958,0.00004411437,0.002410575,0.1997427],"genre_scores_gemma":[0.9819483,0.0002328715,0.01323212,0.00003379366,0.0000122262,0.000456261,0.0002243451,0.00007745741,0.003782596],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.6058468,"threshold_uncertainty_score":0.9998289,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01108451531020899,"score_gpt":0.2262160024822942,"score_spread":0.2151314871720852,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}