{"id":"W4288334094","doi":"","title":"Electrical and optical characterization of a capacitively-coupled RF plasma with a pulsed argon gas injection","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Montréal","funders":"","keywords":"Argon; Capacitively coupled plasma; Plasma; Materials science; Characterization (materials science); Optoelectronics; Radio frequency; Inductively coupled plasma; Atomic physics; Electrical engineering; Physics; Nanotechnology; Engineering; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002752873,0.0003475753,0.0003081562,0.000265935,0.0003736394,0.0004050701,0.0008005084,0.000807519,0.002262279],"category_scores_gemma":[0.0006293062,0.0002055306,0.0002935964,0.0003589367,0.0005251367,0.0005054831,0.0003540255,0.0003758878,0.0003591252],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003445797,"about_ca_system_score_gemma":0.0002261045,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006236278,"about_ca_topic_score_gemma":0.0005389877,"domain_scores_codex":[0.9995028,0.00004558538,0.00001484141,0.0001602506,0.0002084919,0.00006800219],"domain_scores_gemma":[0.999338,0.000250634,0.0001102987,0.00007752198,0.0001541636,0.00006932463],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002427576,0.00002526432,0.0002869723,0.00004112109,0.000009561401,0.0001132654,0.00007482922,0.0001281668,0.9966119,0.00009039281,0.0001151984,0.002260596],"study_design_scores_gemma":[0.00003810308,0.0008080435,0.006153515,0.000006399552,0.00002896016,0.000450604,0.00006407151,0.003607754,0.9868383,0.0001165985,0.001865978,0.00002170961],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9871483,0.0004482584,0.008474333,0.0003173534,0.0001068152,0.00004378756,0.0002521031,0.0003300277,0.0028788],"genre_scores_gemma":[0.9955894,0.00009831254,0.002331907,0.00007112685,0.00003294072,0.00001379376,0.00006745828,0.00002632233,0.001768637],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002262279,"threshold_uncertainty_score":0.007568002,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006696470232756803,"score_gpt":0.1840046327465776,"score_spread":0.1773081625138208,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}