{"id":"W4288334094","doi":"","title":"Electrical and optical characterization of a capacitively-coupled RF plasma with a pulsed argon gas injection","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Montréal","funders":"","keywords":"Argon; Capacitively coupled plasma; Plasma; Materials science; Characterization (materials science); Optoelectronics; Radio frequency; Inductively coupled plasma; Atomic physics; Electrical engineering; Physics; Nanotechnology; Engineering; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0007248627,0.0002667357,0.0003536541,0.0001888443,0.00009424854,0.000139872,0.0002930339,0.0002295723,0.00001154876],"category_scores_gemma":[0.0003384539,0.0002752125,0.00006741944,0.0003269164,0.0001332088,0.00008722243,0.0001829964,0.0005005441,0.00001213713],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008633226,"about_ca_system_score_gemma":0.0001035631,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000109294,"about_ca_topic_score_gemma":0.0001637404,"domain_scores_codex":[0.9984023,0.0003022468,0.0003750887,0.0004277414,0.0002486022,0.0002440059],"domain_scores_gemma":[0.9975015,0.0007320181,0.0002069901,0.0006890633,0.0007497327,0.0001206794],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001702439,0.001776229,0.005747527,0.001636453,0.0006970448,0.00001226334,0.007808834,0.03013008,0.7566982,0.1421584,0.0002330177,0.0529317],"study_design_scores_gemma":[0.0005673694,0.000001961487,0.008430685,0.0008284275,0.00007303197,0.0000218503,0.00001966571,0.684796,0.3038638,0.0005891732,0.0004501262,0.0003579332],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8708007,0.00004562025,0.123141,0.0006520996,0.0000640232,0.0005111692,0.0001014684,0.0001624901,0.004521396],"genre_scores_gemma":[0.9908422,0.0004793959,0.0074779,0.00001099817,0.00001499566,0.0001306423,0.0007120139,0.00005058041,0.0002812768],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.6546659,"threshold_uncertainty_score":0.99997,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006696470232756803,"score_gpt":0.1840046327465776,"score_spread":0.1773081625138208,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}