{"id":"W4289812301","doi":"","title":"Planar HfOx based ReRAM using nanodamascene process","year":2016,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Resistive random-access memory; Process (computing); Planar; Computer science; Materials science; Optoelectronics; Electrical engineering; Computer graphics (images); Engineering; Voltage; Operating system","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005994152,0.0002013293,0.0002456546,0.0001265495,0.0002038048,0.0003336186,0.0003893143,0.0003447508,0.002615396],"category_scores_gemma":[0.0001076584,0.0001074014,0.0001112663,0.0001368771,0.0001580971,0.0004244969,0.0001818575,0.0002515292,0.000493482],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002010501,"about_ca_system_score_gemma":0.0001408243,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004013735,"about_ca_topic_score_gemma":0.00101161,"domain_scores_codex":[0.9999368,0.000002986657,0.000002130646,0.00001705819,0.0000254287,0.00001564667],"domain_scores_gemma":[0.9999235,0.0000148125,0.00001812461,0.00001741415,0.00001695044,0.000009201623],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006442166,0.00001796677,0.00009373904,0.0001086187,0.000004523236,0.0001471379,0.00004675619,0.0001979354,0.9963372,0.0003571683,0.0003009056,0.002323789],"study_design_scores_gemma":[0.00001151008,0.000238187,0.0008186252,0.000008499444,0.00001090033,0.000125179,0.00005450791,0.001199443,0.9942096,0.00008760623,0.003228903,0.000006995894],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9893966,0.0008570932,0.002415145,0.0001787306,0.0001523877,0.00003316918,0.000280021,0.0002572695,0.006429579],"genre_scores_gemma":[0.9903922,0.00030389,0.002641498,0.00002883998,0.00001531225,0.00001450699,0.0001236094,0.00002412218,0.006456126],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002615396,"threshold_uncertainty_score":0.008749366,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01775078114778802,"score_gpt":0.2320739572585638,"score_spread":0.2143231761107757,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}