{"id":"W4289875183","doi":"","title":"Photoluminescence monitored photocorrosion for metrology of GaAs/AlGaAs heterostructures at the nanoscale: digital etching of GaAs: a 30-year (almost) perspective","year":2017,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Montréal; Université de Sherbrooke","funders":"","keywords":"Heterojunction; Photoluminescence; Etching (microfabrication); Optoelectronics; Materials science; Metrology; Nanoscopic scale; Gallium arsenide; Perspective (graphical); Nanotechnology; Optics; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002415758,0.0003460084,0.0002783646,0.0005285595,0.0001907346,0.001405028,0.0006940991,0.001458469,0.001860658],"category_scores_gemma":[0.0007867298,0.0002211672,0.0001984355,0.000401655,0.0009769519,0.001546601,0.0006640051,0.0006380198,0.000353013],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001128962,"about_ca_system_score_gemma":0.0005089132,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006842848,"about_ca_topic_score_gemma":0.001411163,"domain_scores_codex":[0.9997165,0.00003927169,0.00001690061,0.00006483241,0.0001292097,0.00003335107],"domain_scores_gemma":[0.9995583,0.0001317964,0.00004826163,0.00004347871,0.0001737882,0.00004448364],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0009214794,0.0002738878,0.004329006,0.001603785,0.00009107208,0.0006004301,0.0006805085,0.00368574,0.7201964,0.03198876,0.007015874,0.228613],"study_design_scores_gemma":[0.00006318244,0.00142247,0.01774525,0.000301852,0.0001158063,0.001605283,0.0008127295,0.02113538,0.6749048,0.00868743,0.2730586,0.0001472561],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4820741,0.3866229,0.06841403,0.01109785,0.00230432,0.0001298575,0.0007029048,0.0005149182,0.04813907],"genre_scores_gemma":[0.8506125,0.07156073,0.03833926,0.001073176,0.001052612,0.00004216398,0.0003485923,0.0001083375,0.0368625],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002415758,"threshold_uncertainty_score":0.0127759,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01220948595400369,"score_gpt":0.2382530990824749,"score_spread":0.2260436131284712,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}