{"id":"W4290465734","doi":"10.3390/act11080224","title":"Resonant Adaptive MEMS Mirror","year":2022,"lang":"en","type":"article","venue":"Actuators","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Deformable mirror; Zernike polynomials; Monochromatic color; Silicon on insulator; Optics; Computer science; Modal analysis; Materials science; Acoustics; Electronic engineering; Adaptive optics; Physics; Optoelectronics; Engineering; Silicon; Vibration; Wavefront","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006897756,0.00007372072,0.00008419088,0.00003247908,0.00008148432,0.000007243896,0.0001318916,0.00001854039,0.000864181],"category_scores_gemma":[0.000007984202,0.00006902597,0.00003771853,0.0001218809,0.00001541125,0.00004799704,0.00005725724,0.0001556595,0.0000974908],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007347645,"about_ca_system_score_gemma":0.00001242579,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003700844,"about_ca_topic_score_gemma":0.00001027295,"domain_scores_codex":[0.999493,0.000009282388,0.00008408283,0.00009313968,0.0001456997,0.0001748105],"domain_scores_gemma":[0.9997633,0.00004279549,0.00000878556,0.0001189422,0.000005414875,0.00006079066],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0004339252,0.0006853955,0.003116369,0.0002887551,0.00149487,0.0009230995,0.0222141,0.01009591,0.02958755,0.2674355,0.1062237,0.5575008],"study_design_scores_gemma":[0.0004313979,0.0001704012,0.003672645,0.000009549432,0.00003155718,0.0000182048,0.001737521,0.1120192,0.005881129,0.002307657,0.873241,0.0004796615],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9274678,0.0008100797,0.0007595858,0.0001355676,0.0008917304,0.0001741666,0.00004076189,0.0004845814,0.06923579],"genre_scores_gemma":[0.9991055,0.00001725128,0.0004393046,0.0001298386,0.00001486334,0.00004140818,0.000003879438,0.00001812832,0.0002298311],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.7670173,"threshold_uncertainty_score":0.9462175,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0127202061309842,"score_gpt":0.2082437751217508,"score_spread":0.1955235689907666,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}