{"id":"W4290465734","doi":"10.3390/act11080224","title":"Resonant Adaptive MEMS Mirror","year":2022,"lang":"en","type":"article","venue":"Actuators","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Deformable mirror; Zernike polynomials; Monochromatic color; Silicon on insulator; Optics; Computer science; Modal analysis; Materials science; Acoustics; Electronic engineering; Adaptive optics; Physics; Optoelectronics; Engineering; Silicon; Vibration; Wavefront","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009264456,0.0002398487,0.0002015934,0.0001373012,0.0001593355,0.0001891811,0.0006714528,0.0004940015,0.001891911],"category_scores_gemma":[0.0001824893,0.000148672,0.0001967437,0.00007701835,0.0001590917,0.000286801,0.0003285699,0.0002564958,0.0008130093],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002656157,"about_ca_system_score_gemma":0.000135017,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001974622,"about_ca_topic_score_gemma":0.0004382076,"domain_scores_codex":[0.9997889,0.00001113482,0.000006842181,0.00005597193,0.0001144311,0.00002272492],"domain_scores_gemma":[0.999902,0.0000177699,0.00001962853,0.00002281875,0.00002697152,0.00001074074],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000297466,0.00001123014,0.0001756578,0.00004069431,0.000004648382,0.00007727146,0.00001270078,0.0003542066,0.9822781,0.0007918806,0.000461838,0.01576197],"study_design_scores_gemma":[0.00003928817,0.0002560787,0.002900135,0.000009656836,0.00002036197,0.001375988,0.00002230307,0.04054224,0.9341961,0.0004122699,0.02019065,0.00003492576],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6407079,0.003375504,0.3107783,0.0006114909,0.0006090329,0.0002104927,0.0004032016,0.002559382,0.04074476],"genre_scores_gemma":[0.8634639,0.0003392044,0.1246947,0.0001930885,0.00006660817,0.00005181314,0.0001070033,0.00005053495,0.01103315],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001891911,"threshold_uncertainty_score":0.00632906,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0127202061309842,"score_gpt":0.2082437751217508,"score_spread":0.1955235689907666,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}