{"id":"W4291929344","doi":"10.31399/asm.edfa.2022-1.p003","title":"Determination of Indenter Crack Probability on Multilayer Stacks using an Acoustic Emission Test Method","year":2022,"lang":"en","type":"article","venue":"EDFA Technical Articles","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Acoustic emission; Wafer; Materials science; Semiconductor; SIGNAL (programming language); Brittle fracture; Brittleness; Optoelectronics; Layer (electronics); Energy (signal processing); CMOS; Acoustics; Fracture (geology); Electronic engineering; Computer science; Composite material; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002573404,0.0003033382,0.0002258757,0.000748485,0.0001901501,0.0002841227,0.0003106407,0.0003751041,0.000858265],"category_scores_gemma":[0.001270334,0.0002182277,0.0001614736,0.0002373301,0.0002108434,0.0003778922,0.0003541908,0.0002693831,0.0001414652],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001689191,"about_ca_system_score_gemma":0.0001109554,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00111458,"about_ca_topic_score_gemma":0.001390995,"domain_scores_codex":[0.9996443,0.00003517192,0.00001931218,0.00007771401,0.0001887022,0.00003474485],"domain_scores_gemma":[0.9989735,0.0003981628,0.0001763245,0.0001118983,0.0002825886,0.00005747612],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000120039,0.00003109855,0.006238497,0.00002649397,0.00002207755,0.00005766839,0.00005928691,0.001128851,0.9812944,0.0001073656,0.0000262687,0.01088801],"study_design_scores_gemma":[0.00001653975,0.0007767028,0.04363928,0.00001280963,0.00005357596,0.0003503594,0.00009130881,0.08105964,0.8733264,0.0000886608,0.000541447,0.00004324437],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9743002,0.0001813101,0.02466291,0.00001514292,0.000009040614,0.00002243332,0.00007220661,0.0001231615,0.0006136295],"genre_scores_gemma":[0.9898708,0.00005593964,0.009791317,0.000005628322,0.000003323355,0.00001042255,0.00002870467,0.000005077104,0.0002288432],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00111458,"threshold_uncertainty_score":0.002871215,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03695661589918284,"score_gpt":0.2919720976147182,"score_spread":0.2550154817155353,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}