{"id":"W4291929344","doi":"10.31399/asm.edfa.2022-1.p003","title":"Determination of Indenter Crack Probability on Multilayer Stacks using an Acoustic Emission Test Method","year":2022,"lang":"en","type":"article","venue":"EDFA Technical Articles","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Acoustic emission; Wafer; Materials science; Semiconductor; SIGNAL (programming language); Brittle fracture; Brittleness; Optoelectronics; Layer (electronics); Energy (signal processing); CMOS; Acoustics; Fracture (geology); Electronic engineering; Computer science; Composite material; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004120371,0.0001266157,0.0001904928,0.0001191516,0.0001065751,0.0000203238,0.0001768897,0.00006881322,0.0003137201],"category_scores_gemma":[0.0001854734,0.0001103899,0.00008150742,0.0003286877,0.00003297448,0.0001329945,0.00005052738,0.0003118447,0.000002906927],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001867118,"about_ca_system_score_gemma":0.00001703801,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003091572,"about_ca_topic_score_gemma":0.00002280401,"domain_scores_codex":[0.9988738,0.00009627515,0.0003401405,0.0002195371,0.000279228,0.0001910571],"domain_scores_gemma":[0.999341,0.000160796,0.00005545856,0.0003016396,0.00007100976,0.00007017187],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000007272051,0.000287096,0.001287842,0.00001929043,0.000008986926,0.000003452902,0.0001644042,0.04358202,0.9445668,0.00002798635,0.00006491208,0.009979906],"study_design_scores_gemma":[0.0001741582,0.0002134406,0.001187921,0.00001992275,0.00006078561,0.000009577501,0.000218669,0.5880807,0.4086138,0.001108629,0.0001469539,0.000165375],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9571192,0.00001431789,0.04227743,0.00003087879,0.00005806378,0.0001530082,0.00001970113,0.0001810807,0.000146313],"genre_scores_gemma":[0.9901809,9.604884e-7,0.009679746,0.00003659718,0.00002786852,0.00002279139,0.000006685035,0.00002251613,0.00002196332],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5444987,"threshold_uncertainty_score":0.4501568,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03695661589918284,"score_gpt":0.2919720976147182,"score_spread":0.2550154817155353,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}